Micromachines 2011, 2(4), 385-393; doi:10.3390/mi2040385

Modeling of the Response Time of Thermal Flow Sensors

1,2,* email, 1email and 1,2email
1 IMSAS (Institute for Microsensors, Actuators and Systems), Microsystems Center Bremen (MCB), University of Bremen, Otto-Hahn-Allee, Bld. NW1, D-28359 Bremen, Germany 2 IGS (International Graduate School for Dynamics in Logistics), University of Bremen, c/o BIBA Hochschulring 20, D-28359 Bremen, Germany
* Author to whom correspondence should be addressed.
Received: 13 September 2011; in revised form: 15 October 2011 / Accepted: 15 October 2011 / Published: 21 October 2011
(This article belongs to the Special Issue Modeling, Testing and Reliability Issues in MEMS Engineering 2011)
PDF Full-text Download PDF Full-Text [681 KB, uploaded 21 October 2011 10:26 CEST]
Abstract: This paper introduces a simple theoretical model for the response time of thermal flow sensors. Response time is defined here as the time needed by the sensor output signal to reach 63.2% of amplitude due to a change of fluid flow. This model uses the finite-difference method to solve the heat transfer equations, taking into consideration the transient conduction and convection between the sensor membrane and the surrounding fluid. Program results agree with experimental measurements and explain the response time dependence on the velocity and the sensor geometry. Values of the response time vary from about 5 ms in the case of stagnant flow to 1.5 ms for a flow velocity of 44 m/s.
Keywords: modeling; thermal flow sensor; response time

Article Statistics

Load and display the download statistics.

Citations to this Article

Cite This Article

MDPI and ACS Style

Issa, S.; Sturm, H.; Lang, W. Modeling of the Response Time of Thermal Flow Sensors. Micromachines 2011, 2, 385-393.

AMA Style

Issa S, Sturm H, Lang W. Modeling of the Response Time of Thermal Flow Sensors. Micromachines. 2011; 2(4):385-393.

Chicago/Turabian Style

Issa, Safir; Sturm, Hannes; Lang, Walter. 2011. "Modeling of the Response Time of Thermal Flow Sensors." Micromachines 2, no. 4: 385-393.

Micromachines EISSN 2072-666X Published by MDPI AG, Basel, Switzerland RSS E-Mail Table of Contents Alert