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Micromachines 2011, 2(2), 221-257; doi:10.3390/mi2020221
Review

Multi-Beam Interference Advances and Applications: Nano-Electronics, Photonic Crystals, Metamaterials, Subwavelength Structures, Optical Trapping, and Biomedical Structures

 and *
School of Electrical and Computer Engineering, Georgia Institute of Technology, Atlanta, GA 30332, USA
* Author to whom correspondence should be addressed.
Received: 14 April 2011 / Revised: 25 May 2011 / Accepted: 27 May 2011 / Published: 3 June 2011
(This article belongs to the Special Issue Nano-photonic Devices)
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Abstract

Research in recent years has greatly advanced the understanding and capabilities of multi-beam interference (MBI). With this technology it is now possible to generate a wide range of one-, two-, and three-dimensional periodic optical-intensity distributions at the micro- and nano-scale over a large length/area/volume. These patterns may be used directly or recorded in photo-sensitive materials using multi-beam interference lithography (MBIL) to accomplish subwavelength patterning. Advances in MBI and MBIL and a very wide range of applications areas including nano-electronics, photonic crystals, metamaterials, subwavelength structures, optical trapping, and biomedical structures are reviewed and put into a unified perspective.
Keywords: multi-beam interference; interference lithography; nano-electronics; photonic crystals; metamaterials; subwavelength structures; optical trapping; biomedical structures multi-beam interference; interference lithography; nano-electronics; photonic crystals; metamaterials; subwavelength structures; optical trapping; biomedical structures
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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Burrow, G.M.; Gaylord, T.K. Multi-Beam Interference Advances and Applications: Nano-Electronics, Photonic Crystals, Metamaterials, Subwavelength Structures, Optical Trapping, and Biomedical Structures. Micromachines 2011, 2, 221-257.

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