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Micromachines 2011, 2(2), 179-220; doi:10.3390/mi2020179

Microvalves and Micropumps for BioMEMS

Department of Bioengineering, University of Washington, Seattle, WA 98195, USA
Permission from CRC Press. This review has been adapted from a chapter from the upcoming textbook by Albert Folch, Introduction to BioMEMS, published by CRC Press.
Author to whom correspondence should be addressed.
Received: 20 March 2011 / Revised: 10 May 2011 / Accepted: 12 May 2011 / Published: 24 May 2011
(This article belongs to the Special Issue Micromixers)


This review presents an extensive overview of a large number of microvalve and micropump designs with great variability in performance and operation. The performance of a given design varies greatly depending on the particular assembly procedure and there is no standardized performance test against which all microvalves and micropumps can be compared. We present the designs with a historical perspective and provide insight into their advantages and limitations for biomedical uses.
Keywords: microvalve; micropump; microfluidics; review microvalve; micropump; microfluidics; review
This is an open access article distributed under the Creative Commons Attribution License (CC BY 3.0).

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MDPI and ACS Style

Au, A.K.; Lai, H.; Utela, B.R.; Folch, A. Microvalves and Micropumps for BioMEMS. Micromachines 2011, 2, 179-220.

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