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Journal: Sensors, 2009
Volume: 9
Page(s): 6200-6218
6200-6218
Article: Fabrication and Performance of MEMS-Based Pressure Sensor Packages Using Patterned Ultra-Thick Photoresists
Chen, L.-T.; Chang, J.-S.; Hsu, C.-Y.; Cheng, W.-H.

http://www.mdpi.com/1424-8220/9/8/6200

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