Sensors 2009, 9(5), 3854-3874; doi:10.3390/s90503854
Article

Nonlinear Dynamics and Chaos of Microcantilever-Based TM-AFMs with Squeeze Film Damping Effects

Received: 27 March 2009; in revised form: 23 April 2009 / Accepted: 13 May 2009 / Published: 20 May 2009
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
Abstract: In Atomic force microscope (AFM) examination of a vibrating microcantilever, the nonlinear tip-sample interaction would greatly influence the dynamics of the cantilever. In this paper, the nonlinear dynamics and chaos of a tip-sample dynamic system being run in the tapping mode (TM) were investigated by considering the effects of hydrodynamic loading and squeeze film damping. The microcantilever was modeled as a spring-mass-damping system and the interaction between the tip and the sample was described by the Lennard-Jones (LJ) potential. The fundamental frequency and quality factor were calculated from the transient oscillations of the microcantilever vibrating in air. Numerical simulations were carried out to study the coupled nonlinear dynamic system using the bifurcation diagram, Poincaré maps, largest Lyapunov exponent, phase portraits and time histories. Results indicated the occurrence of periodic and chaotic motions and provided a comprehensive understanding of the hydrodynamic loading of microcantilevers. It was demonstrated that the coupled dynamic system will experience complex nonlinear oscillation as the system parameters change and the effect of squeeze film damping is not negligible on the micro-scale.
Keywords: TM-AFM; microcantilever; squeeze film damping; Lennard-Jones (LJ) potential
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MDPI and ACS Style

Zhang, W.-M.; Meng, G.; Zhou, J.-B.; Chen, J.-Y. Nonlinear Dynamics and Chaos of Microcantilever-Based TM-AFMs with Squeeze Film Damping Effects. Sensors 2009, 9, 3854-3874.

AMA Style

Zhang W-M, Meng G, Zhou J-B, Chen J-Y. Nonlinear Dynamics and Chaos of Microcantilever-Based TM-AFMs with Squeeze Film Damping Effects. Sensors. 2009; 9(5):3854-3874.

Chicago/Turabian Style

Zhang, Wen-Ming; Meng, Guang; Zhou, Jian-Bin; Chen, Jie-Yu. 2009. "Nonlinear Dynamics and Chaos of Microcantilever-Based TM-AFMs with Squeeze Film Damping Effects." Sensors 9, no. 5: 3854-3874.

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