Sensors 2009, 9(8), 6219-6231; doi:10.3390/s90806219
Article

Manufacture of Micromirror Arrays Using a CMOS-MEMS Technique

1email, 1,* email, 2email and 3email
Received: 29 June 2009; in revised form: 25 July 2009 / Accepted: 3 August 2009 / Published: 6 August 2009
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
Abstract: In this study we used the commercial 0.35 µm CMOS (complementary metal oxide semiconductor) process and simple maskless post-processing to fabricate an array of micromirrors exhibiting high natural frequency. The micromirrors were manufactured from aluminum; the sacrificial layer was silicon dioxide. Because we fabricated the micromirror arrays using the standard CMOS process, they have the potential to be integrated with circuitry on a chip. For post-processing we used an etchant to remove the sacrificial layer and thereby suspend the micromirrors. The micromirror array contained a circular membrane and four fixed beams set symmetrically around and below the circular mirror; these four fan-shaped electrodes controlled the tilting of the micromirror. A MEMS (microelectromechanical system) motion analysis system and a confocal 3D-surface topography were used to characterize the properties and configuration of the micromirror array. Each micromirror could be rotated in four independent directions. Experimentally, we found that the micromirror had a tilting angle of about 2.55° when applying a driving voltage of 40 V. The natural frequency of the micromirrors was 59.1 kHz.
Keywords: micromirror array; microactuator; CMOS-MEMS
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MDPI and ACS Style

Kao, P.-H.; Dai, C.-L.; Hsu, C.-C.; Wu, C.-C. Manufacture of Micromirror Arrays Using a CMOS-MEMS Technique. Sensors 2009, 9, 6219-6231.

AMA Style

Kao P-H, Dai C-L, Hsu C-C, Wu C-C. Manufacture of Micromirror Arrays Using a CMOS-MEMS Technique. Sensors. 2009; 9(8):6219-6231.

Chicago/Turabian Style

Kao, Pin-Hsu; Dai, Ching-Liang; Hsu, Cheng-Chih; Wu, Chyan-Chyi. 2009. "Manufacture of Micromirror Arrays Using a CMOS-MEMS Technique." Sensors 9, no. 8: 6219-6231.

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