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Sensors 2009, 9(8), 6219-6231; doi:10.3390/s90806219
Article

Manufacture of Micromirror Arrays Using a CMOS-MEMS Technique

1
,
1,* , 2
 and
3
1 Department of Mechanical Engineering, National Chung Hsing University, Taichung, 402 Taiwan 2 Department of Electro-Optical Engineering, Yuan Ze University, Taoyuan, 320 Taiwan 3 Department of Mechanical and Electro-Mechanical Engineering, Tamkang University, Tamsui, 251 Taiwan
* Author to whom correspondence should be addressed.
Received: 29 June 2009 / Revised: 25 July 2009 / Accepted: 3 August 2009 / Published: 6 August 2009
(This article belongs to the Special Issue Modeling, Testing and Reliability Issues in MEMS Engineering - 2009)
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Abstract

In this study we used the commercial 0.35 µm CMOS (complementary metal oxide semiconductor) process and simple maskless post-processing to fabricate an array of micromirrors exhibiting high natural frequency. The micromirrors were manufactured from aluminum; the sacrificial layer was silicon dioxide. Because we fabricated the micromirror arrays using the standard CMOS process, they have the potential to be integrated with circuitry on a chip. For post-processing we used an etchant to remove the sacrificial layer and thereby suspend the micromirrors. The micromirror array contained a circular membrane and four fixed beams set symmetrically around and below the circular mirror; these four fan-shaped electrodes controlled the tilting of the micromirror. A MEMS (microelectromechanical system) motion analysis system and a confocal 3D-surface topography were used to characterize the properties and configuration of the micromirror array. Each micromirror could be rotated in four independent directions. Experimentally, we found that the micromirror had a tilting angle of about 2.55° when applying a driving voltage of 40 V. The natural frequency of the micromirrors was 59.1 kHz.
Keywords: micromirror array; microactuator; CMOS-MEMS micromirror array; microactuator; CMOS-MEMS
This is an open access article distributed under the Creative Commons Attribution License (CC BY 3.0).
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Kao, P.-H.; Dai, C.-L.; Hsu, C.-C.; Wu, C.-C. Manufacture of Micromirror Arrays Using a CMOS-MEMS Technique. Sensors 2009, 9, 6219-6231.

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