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• Ramos, D
• Mertens, J
• Calleja, M
• Tamayo, J
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• Ramos, D
• Mertens, J
• Calleja, M
• Tamayo, J
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• Ramos, D
• Mertens, J
• Calleja, M
• Tamayo, J

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Sensors 2007, 7(9), 1757-1765; doi:10.3390/s7091757

Communication

Study of the origin of bending induced by bimetallic effect on microcantilever

Daniel Ramos, Johann Mertens, Montserrat Calleja and Javier Tamayo*

BioNanoMechanics Lab, National Centre for Microelectronics, IMM-CNM, CSIC Isaac Newton 8 (PTM), Tres Cantos 28760, Madrid, Spain

* Author to whom correspondence should be addressed.

Received: 30 July 2007 / Accepted: 4 September 2007 / Published: 5 September 2007

(This article belongs to the Special Issue Cantilever, Microcantilevers and Nanocantilever Sensors and Biosensors)

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Abstract: An analytical model for predicting the deflection and force of a bimaterialcantilever is presented. We introduce the clamping effect characterised by an axial loadupon temperature changes. This new approach predicts a non linear thermal dependence ofcantilever strain. A profilometry technique was used to measure the thermal strain.Comparison with experimental results is used to verify the model. The concordance of theanalytical model presented with experimental measurements is better than 10%

Keywords: cantilever; stress; strain; temperature; Stoney’s equation; axial force; profile.

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