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Study of the origin of bending induced by bimetallic effect on microcantilever
BioNanoMechanics Lab, National Centre for Microelectronics, IMM-CNM, CSIC Isaac Newton 8 (PTM), Tres Cantos 28760, Madrid, Spain
* Author to whom correspondence should be addressed.
Received: 30 July 2007; Accepted: 4 September 2007 / Published: 5 September 2007
Abstract: An analytical model for predicting the deflection and force of a bimaterialcantilever is presented. We introduce the clamping effect characterised by an axial loadupon temperature changes. This new approach predicts a non linear thermal dependence ofcantilever strain. A profilometry technique was used to measure the thermal strain.Comparison with experimental results is used to verify the model. The concordance of theanalytical model presented with experimental measurements is better than 10%
Keywords: cantilever; stress; strain; temperature; Stoney’s equation; axial force; profile.
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Ramos, D.; Mertens, J.; Calleja, M.; Tamayo, J. Study of the origin of bending induced by bimetallic effect on microcantilever. Sensors 2007, 7, 1757-1765.
Ramos D, Mertens J, Calleja M, Tamayo J. Study of the origin of bending induced by bimetallic effect on microcantilever. Sensors. 2007; 7(9):1757-1765.
Ramos, Daniel; Mertens, Johann; Calleja, Montserrat; Tamayo, Javier. 2007. "Study of the origin of bending induced by bimetallic effect on microcantilever." Sensors 7, no. 9: 1757-1765.