Next Article in Journal
Reliability of a MEMS Actuator Improved by Spring Corner Designs and Reshaped Driving Waveforms
Next Article in Special Issue
Study of the origin of bending induced by bimetallic effect on microcantilever
Previous Article in Journal
High Resolution Marine Magnetic Survey of Shallow Water Littoral Area
Sensors 2007, 7(9), 1713-1719; doi:10.3390/s7091713

Modeling of Photoinduced Deformation in Silicon Microcantilever

* ,
ASIC and System National Key Lab, Department of Microelectronics, Fudan University, Shanghai 200433, China
* Author to whom correspondence should be addressed.
Received: 24 July 2007 / Accepted: 27 August 2007 / Published: 3 September 2007
View Full-Text   |   Download PDF [308 KB, uploaded 21 June 2014]   |  


A model for prediction the photostriction effect in silicon microcantilevers is built up based on the fundamentals of mechanics and semiconductor physics. By considering the spatial distribution and surface recombination of photoinduced carriers in silicon, the model interprets the cause of the photoinduced bending. The results from our model much more closely approximate the experimental values than the former model built up by Datskos, Rajic and Datskou [1](APL, Vol.73 (1998) No.16, pp 3219-2321), represented by the reduction of the error between calculation and measurement from 25 times to 0.85 times.
Keywords: Photostriction; microcantilever; deformation; silicon Photostriction; microcantilever; deformation; silicon
This is an open access article distributed under the Creative Commons Attribution License (CC BY 3.0).

Share & Cite This Article

Further Mendeley | CiteULike
Export to BibTeX |
EndNote |
MDPI and ACS Style

Guo, Y.-L.; Zhou, J.; Huang, Y.; Bao, M. Modeling of Photoinduced Deformation in Silicon Microcantilever. Sensors 2007, 7, 1713-1719.

View more citation formats

Related Articles

Article Metrics

For more information on the journal, click here


[Return to top]
Sensors EISSN 1424-8220 Published by MDPI AG, Basel, Switzerland RSS E-Mail Table of Contents Alert