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Journal: Sensors, 2007
Volume: 7
Page(s): 1720-1730
1720-1730
Article: Reliability of a MEMS Actuator Improved by Spring Corner Designs and Reshaped Driving Waveforms
Hsieh, H.-T.; Su, G.-D.J.

http://www.mdpi.com/1424-8220/7/9/1720

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