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Journal: Sensors, 2007
Volume: 7
Page(s): 3012-3026
3012-3026
Article: Influence of Damping on the Dynamical Behavior of the Electrostatic Parallel-plate and Torsional Actuators with Intermolecular Forces
Lin, W.-H.; Zhao, Y.-P.

http://www.mdpi.com/1424-8220/7/12/3012

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