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Journal: Sensors, 2007
Volume: 7
Page(s): 2389-2401
2389-2401
Article: A MEMS-based Air Flow Sensor with a Free-standing Micro-cantilever Structure
Wang, Y.-H.; Lee, C.-Y.; Chiang, C.-M.

http://www.mdpi.com/1424-8220/7/10/2389

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