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Quantitative Boundary Support Characterization for Cantilever MEMS
Optical Microsystems Laboratory, CONCAVE Research Center Department of Mechanical & Industrial Engineering, Concordia University, Montreal, H3G 1M8 Canada
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Received: 6 September 2007; Accepted: 26 September 2007 / Published: 3 October 2007
Abstract: Microfabrication limitations are of concern especially for suspended Micro-Electro-Mechanical-Systems (MEMS) microstructures such as cantilevers. The static anddynamic qualities of such microscale devices are directly related to the invariant and variantproperties of the microsystem. Among the invariant properties, microfabrication limitationscan be quantified only after the fabrication of the device through testing. However, MEMSare batch fabricated in large numbers where individual testing is neither possible nor costeffective. Hence, a suitable test algorithm needs to be developed where the test resultsobtained for a few devices can be applied to the whole fabrication batch, and also to thefoundry process in general. In this regard, this paper proposes a method to test MEMScantilevers under variant electro-thermal influences in order to quantify the effectiveboundary support condition obtained for a foundry process. A non-contact optical sensingapproach is employed for the dynamic testing. The Rayleigh-Ritz energy method usingboundary characteristic orthogonal polynomials is employed for the modeling andtheoretical analysis.
Keywords: MEMS; cantilevers; microfabrication; boundary support; Rayleigh-Ritz
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Rinaldi, G.; Packirisamy, M.; Stiharu, I. Quantitative Boundary Support Characterization for Cantilever MEMS. Sensors 2007, 7, 2062-2079.
Rinaldi G, Packirisamy M, Stiharu I. Quantitative Boundary Support Characterization for Cantilever MEMS. Sensors. 2007; 7(10):2062-2079.
Rinaldi, Gino; Packirisamy, Muthukumaran; Stiharu, Ion. 2007. "Quantitative Boundary Support Characterization for Cantilever MEMS." Sensors 7, no. 10: 2062-2079.