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A Wireless Passive Pressure Microsensor Fabricated in HTCC MEMS Technology for Harsh Environments
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Sensors 2013, 13(10), 14175-14188; doi:10.3390/s131014175

Remote Driven and Read MEMS Sensors for Harsh Environments

1
General Electric Global Research, One Research Circle, Niskayuna, NY 12309, USA
2
General Electric Power & Water, One River Road, Schenectady, NY 12345, USA
*
Author to whom correspondence should be addressed.
Received: 4 September 2013 / Revised: 29 September 2013 / Accepted: 29 September 2013 / Published: 21 October 2013
(This article belongs to the Special Issue Sensors for Harsh-Environment Applications)
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Abstract

The utilization of high accuracy sensors in harsh environments has been limited by the temperature constraints of the control electronics that must be co-located with the sensor. Several methods of remote interrogation for resonant sensors are presented in this paper which would allow these sensors to be extended to harsh environments. This work in particular demonstrates for the first time the ability to acoustically drive a silicon comb drive resonator into resonance and electromagnetically couple to the resonator to read its frequency. The performance of this system was studied as a function of standoff distance demonstrating the ability to excite and read the device from 22 cm when limited to drive powers of 30 mW. A feedback architecture was implemented that allowed the resonator to be driven into resonance from broadband noise and a standoff distance of 15 cm was demonstrated. It is emphasized that no junction-based electronic device was required to be co-located with the resonator, opening the door for the use of silicon-based, high accuracy MEMS devices in high temperature wireless applications. View Full-Text
Keywords: acoustic resonator; electromagnetic coupling; high temperature; microelectromechanical devices acoustic resonator; electromagnetic coupling; high temperature; microelectromechanical devices
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MDPI and ACS Style

Knobloch, A.J.; Ahmad, F.R.; Sexton, D.W.; Vernooy, D.W. Remote Driven and Read MEMS Sensors for Harsh Environments. Sensors 2013, 13, 14175-14188.

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