Sensors 2013, 13(10), 14175-14188; doi:10.3390/s131014175

Remote Driven and Read MEMS Sensors for Harsh Environments

1,* , 1
, 1
 and 2
Received: 4 September 2013; in revised form: 29 September 2013 / Accepted: 29 September 2013 / Published: 21 October 2013
(This article belongs to the Special Issue Sensors for Harsh-Environment Applications)
View Full-Text   |   Download PDF [415 KB, uploaded 21 June 2014]
Abstract: The utilization of high accuracy sensors in harsh environments has been limited by the temperature constraints of the control electronics that must be co-located with the sensor. Several methods of remote interrogation for resonant sensors are presented in this paper which would allow these sensors to be extended to harsh environments. This work in particular demonstrates for the first time the ability to acoustically drive a silicon comb drive resonator into resonance and electromagnetically couple to the resonator to read its frequency. The performance of this system was studied as a function of standoff distance demonstrating the ability to excite and read the device from 22 cm when limited to drive powers of 30 mW. A feedback architecture was implemented that allowed the resonator to be driven into resonance from broadband noise and a standoff distance of 15 cm was demonstrated. It is emphasized that no junction-based electronic device was required to be co-located with the resonator, opening the door for the use of silicon-based, high accuracy MEMS devices in high temperature wireless applications.
Keywords: acoustic resonator; electromagnetic coupling; high temperature; microelectromechanical devices
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

Export to BibTeX |

MDPI and ACS Style

Knobloch, A.J.; Ahmad, F.R.; Sexton, D.W.; Vernooy, D.W. Remote Driven and Read MEMS Sensors for Harsh Environments. Sensors 2013, 13, 14175-14188.

AMA Style

Knobloch AJ, Ahmad FR, Sexton DW, Vernooy DW. Remote Driven and Read MEMS Sensors for Harsh Environments. Sensors. 2013; 13(10):14175-14188.

Chicago/Turabian Style

Knobloch, Aaron J.; Ahmad, Faisal R.; Sexton, Dan W.; Vernooy, David W. 2013. "Remote Driven and Read MEMS Sensors for Harsh Environments." Sensors 13, no. 10: 14175-14188.

Sensors EISSN 1424-8220 Published by MDPI AG, Basel, Switzerland RSS E-Mail Table of Contents Alert