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Journal: Sensors, 2010
Volume: 10
Page(s): 6149-6171
6149-6171
Article: Review on the Modeling of Electrostatic MEMS
Chuang, W.-C.; Lee, H.-L.; Chang, P.-Z.; Hu, Y.-C.

http://www.mdpi.com/1424-8220/10/6/6149

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