Sensors 2010, 10(4), 2675-2693; doi:10.3390/s100402675
Article

Development of X-Y Servo Pneumatic-Piezoelectric Hybrid Actuators for Position Control with High Response, Large Stroke and Nanometer Accuracy

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Received: 13 January 2010; in revised form: 28 January 2010 / Accepted: 2 March 2010 / Published: 25 March 2010
(This article belongs to the Section Physical Sensors)
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
Abstract: This study aims to develop a X-Y dual-axial intelligent servo pneumatic-piezoelectric hybrid actuator for position control with high response, large stroke (250 mm, 200 mm) and nanometer accuracy (20 nm). In each axis, the rodless pneumatic actuator serves to position in coarse stroke and the piezoelectric actuator compensates in fine stroke. Thus, the overall control systems of the single axis become a dual-input single-output (DISO) system. Although the rodless pneumatic actuator has relatively larger friction force, it has the advantage of mechanism for multi-axial development. Thus, the X-Y dual-axial positioning system is developed based on the servo pneumatic-piezoelectric hybrid actuator. In addition, the decoupling self-organizing fuzzy sliding mode control is developed as the intelligent control strategies. Finally, the proposed novel intelligent X-Y dual-axial servo pneumatic-piezoelectric hybrid actuators are implemented and verified experimentally.
Keywords: pneumatic-piezoelectric hybrid actuator; piezoelectric; pneumatic; position control; decoupling self-organizing fuzzy sliding mode control and dual-input single-output
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MDPI and ACS Style

Chiang, M.-H. Development of X-Y Servo Pneumatic-Piezoelectric Hybrid Actuators for Position Control with High Response, Large Stroke and Nanometer Accuracy. Sensors 2010, 10, 2675-2693.

AMA Style

Chiang M-H. Development of X-Y Servo Pneumatic-Piezoelectric Hybrid Actuators for Position Control with High Response, Large Stroke and Nanometer Accuracy. Sensors. 2010; 10(4):2675-2693.

Chicago/Turabian Style

Chiang, Mao-Hsiung. 2010. "Development of X-Y Servo Pneumatic-Piezoelectric Hybrid Actuators for Position Control with High Response, Large Stroke and Nanometer Accuracy." Sensors 10, no. 4: 2675-2693.

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