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Journal: Sensors, 2010
Volume: 10
Page(s): 2675-2693
2675-2693
Article: Development of X-Y Servo Pneumatic-Piezoelectric Hybrid Actuators for Position Control with High Response, Large Stroke and Nanometer Accuracy
Chiang, M.-H.

http://www.mdpi.com/1424-8220/10/4/2675

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