Next Article in Journal
Chord Recognition Based on Temporal Correlation Support Vector Machine
Next Article in Special Issue
A Model to Determinate the Influence of Probability Density Functions (PDFs) of Input Quantities in Measurements
Previous Article in Journal
Simulation of Reservoir Sediment Flushing of the Three Gorges Reservoir Using an Artificial Neural Network
Previous Article in Special Issue
State of the Art of Tactile Micro Coordinate Metrology
Article Menu

Export Article

Open AccessArticle
Appl. Sci. 2016, 6(5), 156; doi:10.3390/app6050156

A Micro-Coordinate Measurement Machine (CMM) for Large-Scale Dimensional Measurement of Micro-Slits

1
Department of Finemechanics, Tohoku University, Sendai 980-8579, Japan
2
Engineering Department, MMC RYOTEC Corporation, Gifu 503-2301, Japan
These authors contributed equally to this work.
*
Author to whom correspondence should be addressed.
Academic Editor: Kuang-Cha Fan
Received: 17 March 2016 / Revised: 7 May 2016 / Accepted: 10 May 2016 / Published: 18 May 2016
(This article belongs to the Special Issue Design and Applications of Coordinate Measuring Machines)

Abstract

This paper presents a micro-coordinate measuring machine (micro-CMM) for large-scale dimensional measurement of a micro-slit on a precision die coater by using a shear-mode micro-probe. A glass micro sphere with a nominal diameter of 52.3 μm was attached on one end of a tapered glass capillary tube as a probe tip ball. The micro-slit width of a slot die coater with a nominal slit width of 85 μm was measured by the micro-CMM. The probe tip was placed in the slit for the measurement. The effective working length of the probe was confirmed experimentally to be at least 1 mm. In order to measure the gap width uniformity over the entire slot die length of 200 mm, an air-bearing linear slide with a travelling stroke of 300 mm was employed in the micro-CMM to position the probe along the length direction of the slot die. The angular alignment error and the motion error of the air-bearing linear slide as well as those of the stages for positioning the probe along the direction perpendicular to the length direction of the slot die were investigated for evaluation of the expanded uncertainty of gap width measurement. View Full-Text
Keywords: measurement; micro-probe; on-line qualification; gauge block; uncertainty; metrology; slot die coater measurement; micro-probe; on-line qualification; gauge block; uncertainty; metrology; slot die coater
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

Scifeed alert for new publications

Never miss any articles matching your research from any publisher
  • Get alerts for new papers matching your research
  • Find out the new papers from selected authors
  • Updated daily for 49'000+ journals and 6000+ publishers
  • Define your Scifeed now

SciFeed Share & Cite This Article

MDPI and ACS Style

Ito, S.; Kikuchi, H.; Chen, Y.; Shimizu, Y.; Gao, W.; Takahashi, K.; Kanayama, T.; Arakawa, K.; Hayashi, A. A Micro-Coordinate Measurement Machine (CMM) for Large-Scale Dimensional Measurement of Micro-Slits. Appl. Sci. 2016, 6, 156.

Show more citation formats Show less citations formats

Note that from the first issue of 2016, MDPI journals use article numbers instead of page numbers. See further details here.

Related Articles

Article Metrics

Article Access Statistics

1

Comments

[Return to top]
Appl. Sci. EISSN 2076-3417 Published by MDPI AG, Basel, Switzerland RSS E-Mail Table of Contents Alert
Back to Top