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Appl. Sci. 2016, 6(5), 156; doi:10.3390/app6050156

A Micro-Coordinate Measurement Machine (CMM) for Large-Scale Dimensional Measurement of Micro-Slits

Department of Finemechanics, Tohoku University, Sendai 980-8579, Japan
Engineering Department, MMC RYOTEC Corporation, Gifu 503-2301, Japan
These authors contributed equally to this work.
Author to whom correspondence should be addressed.
Academic Editor: Kuang-Cha Fan
Received: 17 March 2016 / Revised: 7 May 2016 / Accepted: 10 May 2016 / Published: 18 May 2016
(This article belongs to the Special Issue Design and Applications of Coordinate Measuring Machines)


This paper presents a micro-coordinate measuring machine (micro-CMM) for large-scale dimensional measurement of a micro-slit on a precision die coater by using a shear-mode micro-probe. A glass micro sphere with a nominal diameter of 52.3 μm was attached on one end of a tapered glass capillary tube as a probe tip ball. The micro-slit width of a slot die coater with a nominal slit width of 85 μm was measured by the micro-CMM. The probe tip was placed in the slit for the measurement. The effective working length of the probe was confirmed experimentally to be at least 1 mm. In order to measure the gap width uniformity over the entire slot die length of 200 mm, an air-bearing linear slide with a travelling stroke of 300 mm was employed in the micro-CMM to position the probe along the length direction of the slot die. The angular alignment error and the motion error of the air-bearing linear slide as well as those of the stages for positioning the probe along the direction perpendicular to the length direction of the slot die were investigated for evaluation of the expanded uncertainty of gap width measurement. View Full-Text
Keywords: measurement; micro-probe; on-line qualification; gauge block; uncertainty; metrology; slot die coater measurement; micro-probe; on-line qualification; gauge block; uncertainty; metrology; slot die coater

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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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MDPI and ACS Style

Ito, S.; Kikuchi, H.; Chen, Y.; Shimizu, Y.; Gao, W.; Takahashi, K.; Kanayama, T.; Arakawa, K.; Hayashi, A. A Micro-Coordinate Measurement Machine (CMM) for Large-Scale Dimensional Measurement of Micro-Slits. Appl. Sci. 2016, 6, 156.

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