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Micromachines 2018, 9(8), 414; https://doi.org/10.3390/mi9080414

Spray Pyrolysis Technique; High-K Dielectric Films and Luminescent Materials: A Review

1
Departamento de Física, CINVESTAV, Apdo. Postal 14-470, Delegación Gustavo A. Madero, Mexico City C.P. 07000, Mexico
2
Instituto Politécnico Nacional, Centro de Investigación en Ciencia Aplicada y Tecnología Avanzada, Legaría 694 Colonia Irrigación, Mexico City C.P. 11500, Mexico
3
Instituto de Investigaciones en Materiales, UNAM, Apdo. Postal 70-360, Delegación Coyoacán, Mexico City C.P. 04150, Mexico
*
Author to whom correspondence should be addressed.
Received: 7 July 2018 / Accepted: 23 July 2018 / Published: 19 August 2018
(This article belongs to the Special Issue Glassy Materials Based Microdevices)
Full-Text   |   PDF [751 KB, uploaded 19 August 2018]   |  

Abstract

The spray pyrolysis technique has been extensively used to synthesize materials for a wide variety of applications such as micro and sub-micrometer dimension MOSFET´s for integrated circuits technology, light emitting devices for displays, and solid-state lighting, planar waveguides and other multilayer structure devices for photonics. This technique is an atmospheric pressure chemical synthesis of materials, in which a precursor solution of chemical compounds in the proper solvent is sprayed and converted into powders or films through a pyrolysis process. The most common ways to generate the aerosol for the spraying process are by pneumatic and ultrasonic systems. The synthesis parameters are usually optimized for the materials optical, structural, electric and mechanical characteristics required. There are several reviews of the research efforts in which spray pyrolysis and the processes involved have been described in detail. This review is intended to focus on research work developed with this technique in relation to high-K dielectric and luminescent materials in the form of coatings and powders as well as multiple layered structures. View Full-Text
Keywords: spray pyrolysis technique; dielectric materials; luminescent materials spray pyrolysis technique; dielectric materials; luminescent materials
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Falcony, C.; Aguilar-Frutis, M.A.; García-Hipólito, M. Spray Pyrolysis Technique; High-K Dielectric Films and Luminescent Materials: A Review. Micromachines 2018, 9, 414.

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