A Compact 2-DOF Piezoelectric-Driven Platform Based on “Z-Shaped” Flexure Hinges
Abstract
:1. Introduction
2. Materials and Methods
2.1. Calculation of the “Z-shaped” Flexure Hinge
2.2. Platform Design
2.3. Dynamic Calculation
3. Results and Discussion
3.1. Experimental System
3.2. Output Performance
3.3. Discussion
4. Conclusions
Acknowledgments
Author Contributions
Conflicts of Interest
References
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Method | Right-Angle | Right-Circular | Z-Shaped |
---|---|---|---|
MCM (Matrix-based compliance modeling) | 265.8 μm | 28.0 μm | 323.5 μm |
FEM (Fine element method) | 261.4 μm | 27.4 μm | 340.1 μm |
Error | 1.7% | 2.2% | 4.9% |
Modal Number | Frequency (Hz) | Resonance Direction |
---|---|---|
First | 678 | y |
Second | 965 | z |
Third | 1297 | θx |
Fourth | 1553 | x |
Fifth | 1832 | θz |
Sixth | 2002 | θy |
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Li, J.; Liu, H.; Zhao, H. A Compact 2-DOF Piezoelectric-Driven Platform Based on “Z-Shaped” Flexure Hinges. Micromachines 2017, 8, 245. https://doi.org/10.3390/mi8080245
Li J, Liu H, Zhao H. A Compact 2-DOF Piezoelectric-Driven Platform Based on “Z-Shaped” Flexure Hinges. Micromachines. 2017; 8(8):245. https://doi.org/10.3390/mi8080245
Chicago/Turabian StyleLi, Jianping, Hui Liu, and Hongwei Zhao. 2017. "A Compact 2-DOF Piezoelectric-Driven Platform Based on “Z-Shaped” Flexure Hinges" Micromachines 8, no. 8: 245. https://doi.org/10.3390/mi8080245