Next Article in Journal
A Compact 2-DOF Piezoelectric-Driven Platform Based on “Z-Shaped” Flexure Hinges
Previous Article in Journal
High Aspect Ratio Nanoimprint Mold-Cavity Filling and Stress Simulation Based on Finite-Element Analysis
Article Menu

Export Article

Open AccessArticle
Micromachines 2017, 8(8), 244; doi:10.3390/mi8080244

Mechanical Vibration Measurement of Solidly Mounted Resonator in Fluid by Atomic Force Microscopy

State Key Lab of Precision Measuring Technology and Instruments, Tianjin University, Tianjin 300072, China
These authors contributed equally to this work.
*
Author to whom correspondence should be addressed.
Received: 11 July 2017 / Revised: 26 July 2017 / Accepted: 4 August 2017 / Published: 7 August 2017
View Full-Text   |   Download PDF [2321 KB, uploaded 7 August 2017]   |  

Abstract

The very small vibration of a solidly-mounted resonator (SMR) in fluid may trigger a relatively large motion of the covering fluid, which was implied by our protein-related experimental results. Therefore, a series of experimental methods for characterizing the mechanical longitudinal vibration of the SMR and the corresponding out-of-plane dynamic response of the fluid above the SMR surface is described in this paper. A SMR device with theoretical resonance frequency of 2.5 GHz was driven by an amplitude-modulated (AM) signal, in which the amplitude is modulated by a signal of the second resonance frequency of the atomic force microscope (AFM) cantilever. A lock-in amplifier is used to demodulate the vibration response of the AFM cantilever, which is proportional to the amplitude of the sample vibration in contact mode and tapping mode. The amplitude-frequency curve of the SMR surface is obtained in contact mode with a relatively stronger interaction force between the AFM tip and the SMR surface. The amplitude-frequency curve of the motion of the liquid above the SMR device and the peak amplitude of the fluid at different distances above the SMR surface are measured in tapping mode with a relatively weak interaction force between the AFM tip and the fluid sample. View Full-Text
Keywords: solidly mounted resonator; mechanical vibration; atomic force microscopy; amplitude modulation; lock-in amplifier solidly mounted resonator; mechanical vibration; atomic force microscopy; amplitude modulation; lock-in amplifier
Figures

Figure 1

This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

Scifeed alert for new publications

Never miss any articles matching your research from any publisher
  • Get alerts for new papers matching your research
  • Find out the new papers from selected authors
  • Updated daily for 49'000+ journals and 6000+ publishers
  • Define your Scifeed now

SciFeed Share & Cite This Article

MDPI and ACS Style

Xu, F.; Guo, X.; Xu, L.; Duan, X.; Zhang, H.; Pang, W.; Fu, X. Mechanical Vibration Measurement of Solidly Mounted Resonator in Fluid by Atomic Force Microscopy. Micromachines 2017, 8, 244.

Show more citation formats Show less citations formats

Note that from the first issue of 2016, MDPI journals use article numbers instead of page numbers. See further details here.

Related Articles

Article Metrics

Article Access Statistics

1

Comments

[Return to top]
Micromachines EISSN 2072-666X Published by MDPI AG, Basel, Switzerland RSS E-Mail Table of Contents Alert
Back to Top