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Micromachines 2017, 8(8), 245; doi:10.3390/mi8080245

A Compact 2-DOF Piezoelectric-Driven Platform Based on “Z-Shaped” Flexure Hinges

1
School of Mechanical Science and Engineering, Jilin University, Changchun 130012, China
2
Graduate School of Engineering, Chiba University, Chiba 263-8522, Japan
*
Author to whom correspondence should be addressed.
Received: 19 July 2017 / Revised: 31 July 2017 / Accepted: 4 August 2017 / Published: 9 August 2017
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Abstract

A compact 2-DOF (two degrees of freedom) piezoelectric-driven platform for 3D cellular bio-assembly systems has been proposed based on “Z-shaped” flexure hinges. Multiple linear motions with high resolution both in x and y directions are achieved. The “Z-shaped” flexure hinges and the parallel-six-connecting-rods structure are utilized to obtain the lowest working stress while compared with other types of flexure hinges. In order to achieve the optimized structure, matrix-based compliance modeling (MCM) method and finite element method (FEM) are used to evaluate both the static and dynamic performances of the proposed 2-DOF piezoelectric-driven platform. Experimental results indicate that the maximum motion displacements for x-stage and y-stage are lx = 17.65 μm and ly = 15.45 μm, respectively. The step response time for x-stage and y-stage are tx = 1.7 ms and ty = 1.6 ms, respectively. View Full-Text
Keywords: piezoelectric; actuator; nano-positioning; flexure hinge; FEM piezoelectric; actuator; nano-positioning; flexure hinge; FEM
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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Li, J.; Liu, H.; Zhao, H. A Compact 2-DOF Piezoelectric-Driven Platform Based on “Z-Shaped” Flexure Hinges. Micromachines 2017, 8, 245.

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