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Micromachines 2017, 8(8), 245;

A Compact 2-DOF Piezoelectric-Driven Platform Based on “Z-Shaped” Flexure Hinges

School of Mechanical Science and Engineering, Jilin University, Changchun 130012, China
Graduate School of Engineering, Chiba University, Chiba 263-8522, Japan
Author to whom correspondence should be addressed.
Received: 19 July 2017 / Revised: 31 July 2017 / Accepted: 4 August 2017 / Published: 9 August 2017
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A compact 2-DOF (two degrees of freedom) piezoelectric-driven platform for 3D cellular bio-assembly systems has been proposed based on “Z-shaped” flexure hinges. Multiple linear motions with high resolution both in x and y directions are achieved. The “Z-shaped” flexure hinges and the parallel-six-connecting-rods structure are utilized to obtain the lowest working stress while compared with other types of flexure hinges. In order to achieve the optimized structure, matrix-based compliance modeling (MCM) method and finite element method (FEM) are used to evaluate both the static and dynamic performances of the proposed 2-DOF piezoelectric-driven platform. Experimental results indicate that the maximum motion displacements for x-stage and y-stage are lx = 17.65 μm and ly = 15.45 μm, respectively. The step response time for x-stage and y-stage are tx = 1.7 ms and ty = 1.6 ms, respectively. View Full-Text
Keywords: piezoelectric; actuator; nano-positioning; flexure hinge; FEM piezoelectric; actuator; nano-positioning; flexure hinge; FEM

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Li, J.; Liu, H.; Zhao, H. A Compact 2-DOF Piezoelectric-Driven Platform Based on “Z-Shaped” Flexure Hinges. Micromachines 2017, 8, 245.

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