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Micromachines 2017, 8(5), 157; doi:10.3390/mi8050157

Low Temperature Plasma Nitriding of Inner Surfaces in Stainless Steel Mini-/Micro-Pipes and Nozzles

1
Department of Engineering and Design, Shibaura Institute of Technology, 3-19-10 Shibaura, Minato-City, Tokyo 108-8548, Japan
2
Research and Development Division, TECDIA, Co., Ltd., 4-3-4 Shibaura, Minato-City, Tokyo 108-0023, Japan
*
Author to whom correspondence should be addressed.
Academic Editors: Hans Nørgaard Hansen and Guido Tosello
Received: 9 January 2017 / Revised: 25 April 2017 / Accepted: 11 May 2017 / Published: 13 May 2017
(This article belongs to the Special Issue Micro/Nano Manufacturing)
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Abstract

Metallic miniature products have been highlighted as mini-/micro-structural components working as a precise mechanism, in dispensing systems, and in medical operations. In particular, the essential mechanical parts such as pipes and nozzles have strength and hardness sufficient for ejecting viscous liquids, solders, and particles. A low-temperature plasma nitriding process was proposed as a surface treatment to improve the engineering durability of stainless steel mini-/micro-pipes and nozzles. Various analyses were performed to describe the inner nitriding process only, from the inner surface of pipes and nozzles to their depth in thickness. AISI316 pipes and AISI316/AISI304 nozzle specimens were used to demonstrate by plasma nitriding for 14.4 ks at 693 K that their inner surfaces had a hardness higher than 800 HV. View Full-Text
Keywords: micro-fabrication; mini- and micro-nozzles; stainless steels; plasma nitriding; inner surfaces; hollow cathode device; nitrogen interstitials; hardness micro-fabrication; mini- and micro-nozzles; stainless steels; plasma nitriding; inner surfaces; hollow cathode device; nitrogen interstitials; hardness
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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Aizawa, T.; Wasa, K. Low Temperature Plasma Nitriding of Inner Surfaces in Stainless Steel Mini-/Micro-Pipes and Nozzles. Micromachines 2017, 8, 157.

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