Next Article in Journal
Fabrication of Mesoscale Channel by Scanning Micro Electrochemical Flow Cell (SMEFC)
Next Article in Special Issue
Design and Fabrication of a 2-Axis Electrothermal MEMS Micro-Scanner for Optical Coherence Tomography
Previous Article in Journal
Ultrasonic-Assisted Incremental Microforming of Thin Shell Pyramids of Metallic Foil
Previous Article in Special Issue
Modeling of MEMS Mirrors Actuated by Phase-Change Mechanism
Article Menu
Issue 5 (May) cover image

Export Article

Open AccessArticle
Micromachines 2017, 8(5), 140; doi:10.3390/mi8050140

A Large-Size MEMS Scanning Mirror for Speckle Reduction Application

1
The School of Materials Science and Engineering, Xi’an Jiaotong University, Xi’an 710049, China
2
Key Lab of Nanodevices and Applications, Suzhou Institute of Nano-tech and Nano-bionics, Chinese Academy of Sciences, Suzhou 215123, China
This paper is an extended version of our paper published in the 12th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 9–12 April 2017, Los Angeles, CA, USA.
*
Author to whom correspondence should be addressed.
Academic Editor: Huikai Xie
Received: 30 March 2017 / Revised: 24 April 2017 / Accepted: 24 April 2017 / Published: 3 May 2017
(This article belongs to the Special Issue MEMS Mirrors)
View Full-Text   |   Download PDF [3093 KB, uploaded 3 May 2017]   |  

Abstract

Based on microelectronic mechanical system (MEMS) processing, a large-size 2-D scanning mirror (6.5 mm in diameter) driven by electromagnetic force was designed and implemented in this paper. We fabricated the micromirror with a silicon wafer and selectively electroplated Ni film on the back of the mirror. The nickel film was magnetized in the magnetic field produced by external current coils, and created the force to drive the mirror’s angular deflection. This electromagnetically actuated micromirror effectively eliminates the ohmic heat and power loss on the mirror plate, which always occurs in the other types of electromagnetic micromirrors with the coil on the mirror plate. The resonant frequency for the scanning mirror is 674 Hz along the slow axis, and 1870 Hz along the fast axis. Furthermore, the scanning angles could achieve ±4.5° for the slow axis with 13.2 mW power consumption, and ±7.6° for the fast axis with 43.3 mW power consumption. The application of the MEMS mirror to a laser display system effectively reduces the laser speckle. With 2-D scanning of the MEMS mirror, the speckle contrast can be reduced from 18.19% to 4.58%. We demonstrated that the image quality of a laser display system could be greatly improved by the MEMS mirror. View Full-Text
Keywords: microelectronic mechanical system (MEMS); speckle reduction; electromagnetic force; optical scanning microelectronic mechanical system (MEMS); speckle reduction; electromagnetic force; optical scanning
Figures

This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

Scifeed alert for new publications

Never miss any articles matching your research from any publisher
  • Get alerts for new papers matching your research
  • Find out the new papers from selected authors
  • Updated daily for 49'000+ journals and 6000+ publishers
  • Define your Scifeed now

SciFeed Share & Cite This Article

MDPI and ACS Style

Li, F.; Zhou, P.; Wang, T.; He, J.; Yu, H.; Shen, W. A Large-Size MEMS Scanning Mirror for Speckle Reduction Application . Micromachines 2017, 8, 140.

Show more citation formats Show less citations formats

Note that from the first issue of 2016, MDPI journals use article numbers instead of page numbers. See further details here.

Related Articles

Article Metrics

Article Access Statistics

1

Comments

[Return to top]
Micromachines EISSN 2072-666X Published by MDPI AG, Basel, Switzerland RSS E-Mail Table of Contents Alert
Back to Top