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Micromachines 2017, 8(5), 138; doi:10.3390/mi8050138

Modeling of MEMS Mirrors Actuated by Phase-Change Mechanism

1
Department of Electrical & Computer Engineering, Michigan State University, East Lansing, MI 48840, USA
2
Department of Electrical & Computer Engineering, University of California, San Diego, La Jolla, CA 92093, USA
3
Air Force Research Laboratory, Sensors Directorate, WP-AFB, Dayton, OH 45433, USA
*
Author to whom correspondence should be addressed.
Academic Editor: Huikai Xie
Received: 7 March 2017 / Revised: 10 April 2017 / Accepted: 19 April 2017 / Published: 26 April 2017
(This article belongs to the Special Issue MEMS Mirrors)
View Full-Text   |   Download PDF [3274 KB, uploaded 26 April 2017]   |  

Abstract

Given the multiple applications for micro-electro-mechanical system (MEMS) mirror devices, most of the research efforts are focused on improving device performance in terms of tilting angles, speed, and their integration into larger arrays or systems. The modeling of these devices is crucial for enabling a platform, in particular, by allowing for the future control of such devices. In this paper, we present the modeling of a MEMS mirror structure with four actuators driven by the phase-change of a thin film. The complexity of the device structure and the nonlinear behavior of the actuation mechanism allow for a comprehensive study that encompasses simpler electrothermal designs, thus presenting a general approach that can be adapted to most MEMS mirror designs based on this operation principle. The MEMS mirrors presented in this work are actuated by Joule heating and tested using optical techniques. Mechanical and thermal models including both pitch and roll displacements are developed by combining theoretical analysis (using both numerical and analytical tools) with experimental data and subsequently verifying with quasi-static and dynamic experiments. View Full-Text
Keywords: MEMS mirrors; vanadium dioxide; phase-change materials; hysteresis; dynamic model MEMS mirrors; vanadium dioxide; phase-change materials; hysteresis; dynamic model
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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Torres, D.; Zhang, J.; Dooley, S.; Tan, X.; Sepúlveda, N. Modeling of MEMS Mirrors Actuated by Phase-Change Mechanism. Micromachines 2017, 8, 138.

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