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Micromachines 2017, 8(4), 120; doi:10.3390/mi8040120

Large-Aperture kHz Operating Frequency Ti-alloy Based Optical Micro Scanning Mirror for LiDAR Application

State Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instrument, Tsinghua University, Haidian District, Beijing 100084, China
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Academic Editor: Huikai Xie
Received: 2 March 2017 / Revised: 6 April 2017 / Accepted: 7 April 2017 / Published: 10 April 2017
(This article belongs to the Special Issue MEMS Mirrors)
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Abstract

A micro scanning mirror is an optical device used to scan laser beams which can be used for Light Detection and Ranging (LiDAR) in applications like unmanned driving or Unmanned Aerial Vehicle (UAV). The MEMS scanning mirror’s light-weight and low-power make it a useful device in LiDAR applications. However, the MEMS scanning mirror’s small aperture limits its application because it is too small to deflect faint receiving light. In this paper, we present a Ti-alloy-based electromagnetic micro scanning mirror with very large-aperture (12 mm) and rapid scanning frequency (1.24 kHz). The size of micro-scanner’s mirror plate reached 12 mm, which is much larger than familiar MEMS scanning mirror. The scanner is designed using MEMS design method and fabricated by electro-sparking manufacture method. As the experimental results show, the resonant frequency of the micro scanning mirror is 1240 Hz and the optical scanning angle can reach 26 degrees at resonance frequency when the actuation current is 250 mApp. View Full-Text
Keywords: large-aperture; micro scanning mirror; micro scanner; Ti-alloy; LiDAR large-aperture; micro scanning mirror; micro scanner; Ti-alloy; LiDAR
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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Ye, L.; Zhang, G.; You, Z. Large-Aperture kHz Operating Frequency Ti-alloy Based Optical Micro Scanning Mirror for LiDAR Application. Micromachines 2017, 8, 120.

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