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Micromachines 2017, 8(4), 107; doi:10.3390/mi8040107

Multi-Response Optimization of Electrothermal Micromirror Using Desirability Function-Based Response Surface Methodology

1
Department of Mechatronics Engineering, National University of Sciences and Technology, Islamabad 44000, Pakistan
2
School of Engineering and Technology, Central Queensland University, Mackay Ooralea 4740, Australia
*
Author to whom correspondence should be addressed.
Academic Editor: Huikai Xie
Received: 20 December 2016 / Revised: 20 March 2017 / Accepted: 23 March 2017 / Published: 1 April 2017
(This article belongs to the Special Issue MEMS Mirrors)
View Full-Text   |   Download PDF [8221 KB, uploaded 1 April 2017]   |  

Abstract

The design of a micromirror for biomedical applications requires multiple output responses to be optimized, given a set of performance parameters and constraints. This paper presents the parametric design optimization of an electrothermally actuated micromirror for the deflection angle, input power, and micromirror temperature rise from the ambient for Optical Coherence Tomography (OCT) system. Initially, a screening design matrix based on the Design of Experiments (DOE) technique is developed and the corresponding output responses are obtained using coupled structural-thermal-electric Finite Element Modeling (FEM). The interaction between the significant design factors is analyzed by developing Response Surface Models (RSM) for the output responses. The output responses are optimized by combining the individual responses into a composite function using desirability function approach. A downhill simplex method, based on the heuristic search algorithm, is implemented on the RSM models to find the optimal levels of the design factors. The predicted values of output responses obtained using multi-response optimization are verified by the FEM simulations. View Full-Text
Keywords: micromirror; Micro-Electro-Mechanical Systems (MEMS); bimorph; optimization; biomedical; desirability function; response surface models micromirror; Micro-Electro-Mechanical Systems (MEMS); bimorph; optimization; biomedical; desirability function; response surface models
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MDPI and ACS Style

Saleem, M.M.; Farooq, U.; Izhar, U.; Khan, U.S. Multi-Response Optimization of Electrothermal Micromirror Using Desirability Function-Based Response Surface Methodology. Micromachines 2017, 8, 107.

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