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Micromachines 2017, 8(3), 92; doi:10.3390/mi8030092

Theoretical and Experimental Study on Vibration Propagation in PMMA Components in Ultrasonic Bonding Process

1
School of Electric Multiple Unit Application and Maintenance Engineering, Dalian Jiaotong University, Dalian 116028, China
2
Dalian Key Laboratory of Welded Structures and Intelligent Manufacturing Technology of Rail Transportation Equipment, Dalian Jiaotong University, Dalian 116028, China
*
Author to whom correspondence should be addressed.
Academic Editors: Andreas Richter and Nam-Trung Nguyen
Received: 23 December 2016 / Revised: 12 February 2017 / Accepted: 15 March 2017 / Published: 20 March 2017
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Abstract

Ultrasonic bonding has an increasing application in the micro assembly of polymeric micro-electro mechanical systems (MEMS) with high requirements for fusion precision. In the ultrasonic bonding process, the propagation of ultrasonic vibration in polymer components is related to the interfacial fusion, which can be used as a monitoring parameter to control ultrasonic energy. To study the vibration propagation in viscoelastic polymer components, finite element analysis on the bonding of poly methyl methacrylate (PMMA) micro connector to substrate for microfluidic system is carried out. Curves of propagated vibration amplitude corresponding to interfacial temperatures are obtained. The ultrasonic vibration propagated in PMMA components are measured through experiments. The theoretical and experimental results are contrasted to analyze the change mechanism of vibration propagation related to temperature. Based on the ultrasonic bonding process controlled by the feedback of vibration propagation, interfacial fusions at different vibration propagation states are obtained through experiments. Interfacial fusion behavior is contrasted to the propagated vibration amplitude in theoretical and experimental studies. The relation between vibration propagation and fusion degree is established with the proper parameter range for the obtained high quality bonding. View Full-Text
Keywords: ultrasonic bonding; micro assembly; vibration propagation; interfacial fusion ultrasonic bonding; micro assembly; vibration propagation; interfacial fusion
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Sun, Y.; Wang, F.; Yang, X. Theoretical and Experimental Study on Vibration Propagation in PMMA Components in Ultrasonic Bonding Process. Micromachines 2017, 8, 92.

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