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Micromachines 2017, 8(2), 51;

Development of MEMS Multi-Mode Electrostatic Energy Harvester Based on the SOI Process

School of Mechanical Engineering, Yonsei University, 50 Yonsei-ro, Seoul 03722, Korea
School of Mechanical Engineering, Yeungnam University, 280 Daehak-ro, Gyeongsan 38541, Korea
Present address: Korea Institute of Industrial Technology (KITECH), 143 Hanggaul-ro, Ansan 15588, Korea.
Authors to whom correspondence should be addressed.
Academic Editors: Hiroshi Toshiyoshi and Chang-Hyeon Ji
Received: 6 December 2016 / Revised: 23 January 2017 / Accepted: 8 February 2017 / Published: 13 February 2017
(This article belongs to the Special Issue MEMS Energy Harvesters)
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Multi-vibrational-mode electrostatic energy harvesters are designed and micro-machined utilizing a simple silicon-on-insulator (SOI) wafer-based process. Enhanced adaptability to various vibrational environments is achieved in the proposed design by using serpentine springs attached to the fishbone-shaped inertial mass. The experimental results show that the developed device could convert an input vibration of 6 g at 1272 Hz to 2.96, 3.28, and 2.30 μW for different vibrational directions of 0°, 30°, and 45° with respect to a reference direction, respectively, when all serpentine springs are identical. An alternative device design using serpentine springs with different stiffnesses between x- and y-axes exhibited resonance frequencies at 1059 and 1635 Hz for an input vibrational direction of 45° and acceleration amplitude of 4 g, successfully generating 0.723 and 0.927 μW of electrical power at each resonance, respectively. View Full-Text
Keywords: energy harvester; micro-electromechanical systems (MEMS); kinetic energy transduction; multi-mode system energy harvester; micro-electromechanical systems (MEMS); kinetic energy transduction; multi-mode system

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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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Jeong, B.; Kim, M.-O.; Lee, J.-I.; Eun, Y.; Choi, J.; Kim, J. Development of MEMS Multi-Mode Electrostatic Energy Harvester Based on the SOI Process. Micromachines 2017, 8, 51.

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