Development of MEMS Multi-Mode Electrostatic Energy Harvester Based on the SOI Process
AbstractMulti-vibrational-mode electrostatic energy harvesters are designed and micro-machined utilizing a simple silicon-on-insulator (SOI) wafer-based process. Enhanced adaptability to various vibrational environments is achieved in the proposed design by using serpentine springs attached to the fishbone-shaped inertial mass. The experimental results show that the developed device could convert an input vibration of 6 g at 1272 Hz to 2.96, 3.28, and 2.30 μW for different vibrational directions of 0°, 30°, and 45° with respect to a reference direction, respectively, when all serpentine springs are identical. An alternative device design using serpentine springs with different stiffnesses between x- and y-axes exhibited resonance frequencies at 1059 and 1635 Hz for an input vibrational direction of 45° and acceleration amplitude of 4 g, successfully generating 0.723 and 0.927 μW of electrical power at each resonance, respectively. View Full-Text
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Jeong, B.; Kim, M.-O.; Lee, J.-I.; Eun, Y.; Choi, J.; Kim, J. Development of MEMS Multi-Mode Electrostatic Energy Harvester Based on the SOI Process. Micromachines 2017, 8, 51.
Jeong B, Kim M-O, Lee J-I, Eun Y, Choi J, Kim J. Development of MEMS Multi-Mode Electrostatic Energy Harvester Based on the SOI Process. Micromachines. 2017; 8(2):51.Chicago/Turabian Style
Jeong, Bongwon; Kim, Min-Ook; Lee, Jae-Ik; Eun, Youngkee; Choi, Jungwook; Kim, Jongbaeg. 2017. "Development of MEMS Multi-Mode Electrostatic Energy Harvester Based on the SOI Process." Micromachines 8, no. 2: 51.
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