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Micromachines 2016, 7(9), 163; doi:10.3390/mi7090163

Direct Growth of Carbon Nanotubes on New High-Density 3D Pyramid-Shaped Microelectrode Arrays for Brain-Machine Interfaces

1
Polystim Neurotechnologies Laboratory, Department of Electrical Engineering, Polytechnique Montreal, Montreal, QC H3C 3A7, Canada
2
Institut Lumière Matière, Université Claude Bernard Lyon 1, CNRS, Univ Lyon, Villeurbanne 69622, France
3
Microfabrication Laboratory (LMF), Thin Films Group (GCM), Department of Engineering Physics, Polytechnique Montreal, Montreal, QC H3C 3A7, Canada
*
Author to whom correspondence should be addressed.
Academic Editors: Kenichi Takahata and Nam-Trung Nguyen
Received: 7 June 2016 / Revised: 26 August 2016 / Accepted: 30 August 2016 / Published: 8 September 2016
(This article belongs to the Special Issue Implantable Microsystems)
View Full-Text   |   Download PDF [6284 KB, uploaded 8 September 2016]   |  

Abstract

Silicon micromachined, high-density, pyramid-shaped neural microelectrode arrays (MEAs) have been designed and fabricated for intracortical 3D recording and stimulation. The novel architecture of this MEA has made it unique among the currently available micromachined electrode arrays, as it has provided higher density contacts between the electrodes and targeted neural tissue facilitating recording from different depths of the brain. Our novel masking technique enhances uniform tip-exposure for variable-height electrodes and improves process time and cost significantly. The tips of the electrodes have been coated with platinum (Pt). We have reported for the first time a selective direct growth of carbon nanotubes (CNTs) on the tips of 3D MEAs using the Pt coating as a catalyzer. The average impedance of the CNT-coated electrodes at 1 kHz is 14 kΩ. The CNT coating led to a 5-fold decrease of the impedance and a 600-fold increase in charge transfer compared with the Pt electrode. View Full-Text
Keywords: brain-machine interface; microelectrode arrays; microfabrication technologies; carbon nanotubes; electrode Impedance brain-machine interface; microelectrode arrays; microfabrication technologies; carbon nanotubes; electrode Impedance
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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Ghane Motlagh, B.; Choueib, M.; Hajhosseini Mesgar, A.; Hasanuzzaman, M.; Sawan, M. Direct Growth of Carbon Nanotubes on New High-Density 3D Pyramid-Shaped Microelectrode Arrays for Brain-Machine Interfaces. Micromachines 2016, 7, 163.

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