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Micromachines 2016, 7(9), 159; doi:10.3390/mi7090159

Resonance Spectrum Characteristics of Effective Electromechanical Coupling Coefficient of High-Overtone Bulk Acoustic Resonator

1
Institute of Acoustics, Chinese Academy of Sciences, Beijing 100190, China
2
University of Chinese Academy of Sciences, Beijing 100049, China
*
Authors to whom correspondence should be addressed.
Academic Editors: Teen-Hang Meen, Shoou-Jinn Chang, Stephen D. Prior and Artde Donald Kin-Tak Lam
Received: 10 June 2016 / Revised: 26 August 2016 / Accepted: 29 August 2016 / Published: 6 September 2016
View Full-Text   |   Download PDF [14303 KB, uploaded 6 September 2016]   |  

Abstract

A high-overtone bulk acoustic resonator (HBAR) consisting of a piezoelectric film with two electrodes on a substrate exhibits a high quality factor (Q) and multi-mode resonance spectrum. By analyzing the influences of each layer’s material and structure (thickness) parameters on the effective electromechanical coupling coefficient (Keff2), the resonance spectrum characteristics of Keff2 have been investigated systematically, and the optimal design of HBAR has been provided. Besides, a device, corresponding to one of the theoretical cases studied, is fabricated and evaluated. The experimental results are basically consistent with the theoretical results. Finally, the effects of Keff2 on the function of the crystal oscillators constructed with HBARs are proposed. The crystal oscillators can operate in more modes and have a larger frequency hopping bandwidth by using the HBARs with a larger Keff2·Q. View Full-Text
Keywords: high-overtone bulk acoustic resonator; effective electromechanical coupling coefficient; resonance spectrum high-overtone bulk acoustic resonator; effective electromechanical coupling coefficient; resonance spectrum
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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Li, J.; Liu, M.; Wang, C. Resonance Spectrum Characteristics of Effective Electromechanical Coupling Coefficient of High-Overtone Bulk Acoustic Resonator. Micromachines 2016, 7, 159.

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