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Micromachines 2016, 7(9), 148; doi:10.3390/mi7090148

Design and Analysis of a New Tuning Fork Structure for Resonant Pressure Sensor

1
Key Laboratory of Micro/Nano Systems for Aerospace, Ministry of Education, Northwestern Polytechnical University, Xi’an 710072, China
2
LeadMEMS Sci&Tech, Xi’an 710075, China
*
Author to whom correspondence should be addressed.
Academic Editor: Joost Lötters
Received: 18 July 2016 / Revised: 18 August 2016 / Accepted: 18 August 2016 / Published: 24 August 2016
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Abstract

This paper presents a micromachined resonant pressure sensor. The sensor is designed to optimize the sensitivity and reduce the cross-talk between the driving electrodes and sensing electrodes. The relationship between the sensitivity of the sensor and the main design parameters is analyzed both theoretically and numerically. The sensing and driving electrodes are optimized to get both high sensing capacitance and low cross-talk. This sensor is fabricated using a micromachining process based on a silicon-on-insulator (SOI) wafer. An open-loop measurement system and a closed-loop self-oscillation system is employed to measure the characteristics of the sensor. The experiment result shows that the sensor has a pressure sensitivity of about 29 Hz/kPa, a nonlinearity of 0.02%FS, a hysteresis error of 0.05%FS, and a repeatability error of 0.01%FS. The temperature coefficient is less than 2 Hz/°C in the range of −40 to 80 °C and the short-term stability of the sensor is better than 0.005%FS. View Full-Text
Keywords: resonant pressure sensor; tuning fork structure; silicon-on-insulator (SOI); sensitivity; cross-talk resonant pressure sensor; tuning fork structure; silicon-on-insulator (SOI); sensitivity; cross-talk
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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MDPI and ACS Style

Sun, X.; Yuan, W.; Qiao, D.; Sun, M.; Ren, S. Design and Analysis of a New Tuning Fork Structure for Resonant Pressure Sensor. Micromachines 2016, 7, 148.

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