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Micromachines 2016, 7(9), 149;

21.69–24.36 GHz MEMS Tunable Band-Pass Filter

School of Electronic Engineering, Beijing University of Posts and Telecommunications, Beijing 100876, China
Author to whom correspondence should be addressed.
Academic Editor: Joost Lötters
Received: 24 June 2016 / Revised: 8 August 2016 / Accepted: 18 August 2016 / Published: 24 August 2016
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The K-band microelectromechanical systems (MEMS) tunable band-pass filter, with a wide-frequency tunable range and miniature size, is able to fulfill the requirements of the multiband satellite communication systems. A novel 21.69–24.36 GHz MEMS tunable band-pass filter is designed, analyzed, fabricated and measured. This paper also designs and analyzes an inductively tuned slow-wave resonator, which consists of the MEMS capacitive switch, the MEMS capacitor and the short metal line. The proposed filter has four different work states by changing the capacitance values of the MEMS switches. Measured results demonstrate that, for all four states, the insertion loss is 2.81, 3.27, 3.65 and 4.03 dB at 24.36, 23.2, 22.24 and 21.69 GHz, respectively. The actuation voltage is 0, 20, 16 and 26 V, respectively. The 3 dB bandwidth of the tunable filter is 5.4%, 6.2%, 5.7% and 5.9%, respectively. This study contributes to the design of miniature millimeter tunable filters with a wide-frequency tunable range. View Full-Text
Keywords: microelectromechanical systems (MEMS); tunable band-pass filter; inductively-tuned slow-wave resonator microelectromechanical systems (MEMS); tunable band-pass filter; inductively-tuned slow-wave resonator

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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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Deng, Z.; Wei, H.; Guo, X. 21.69–24.36 GHz MEMS Tunable Band-Pass Filter. Micromachines 2016, 7, 149.

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