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Micromachines 2015, 6(1), 151-159; doi:10.3390/mi6010151

Optimisation Design of Coupling Region Based on SOI Micro-Ring Resonator

1
Key Laboratory of Instrumentation Science and Dynamic Measurement of Ministry of Education, North University of China, Taiyuan 030051, Shanxi, China
2
Science and Technology on Electronic Test & Measurement Laboratory, North University of China, Taiyuan 030051, Shanxi, China
These authors contributed equally to this work.
*
Author to whom correspondence should be addressed.
Academic Editor: Jeong-Bong Lee
Received: 14 November 2014 / Accepted: 25 December 2014 / Published: 31 December 2014
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Abstract

Design optimization of the coupling region is conducted in order to solve the difficulty of achieving a higher quality factor (Q) for large size resonators based on silicon-on-insulator (SOI). Relations among coupling length, coupling ratio and quality factor of the optical cavities are theoretically analyzed. Resonators (R = 100 μm) with different coupling styles, concentric, straight, and butterfly, are prepared by the micro-electro-mechanical-systems (MEMS) process. Coupling experimental results show that micro-cavity of butterfly-coupled style obtains the narrowest (3 dB) bandwidth, and the quality factor has been greatly improved. The results provide the foundation for realization of a large size, high-Q resonator, and its development and application in the integrated optical gyroscopes, filters, sensors, and other related fields. View Full-Text
Keywords: integrated optics; resonator; quality factor; coupling design; coupling test integrated optics; resonator; quality factor; coupling design; coupling test
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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Yan, S.; Li, M.; Luo, L.; Ma, K.; Xue, C.; Zhang, W. Optimisation Design of Coupling Region Based on SOI Micro-Ring Resonator. Micromachines 2015, 6, 151-159.

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