Micromachines 2013, 4(4), 431-443; doi:10.3390/mi4040431

A Bi-Directional Out-of-Plane Actuator by Electrostatic Force

1 School of Electrical, Computer and Energy Engineering, Arizona State University, Tempe, AZ 85287, USA 2 State Key Lab of Optical Technologies for Microfabrication, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China
* Author to whom correspondence should be addressed.
Received: 1 July 2013; in revised form: 21 August 2013 / Accepted: 30 October 2013 / Published: 5 December 2013
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Abstract: Presented in this paper is a bi-directional out-of-plane actuator which combines the merits of the electrostatic repulsive principle and the electrostatic attractive principle. By taking advantage of the electrostatic repulsive mode, the common “pull-in” instability can be lessened to enlarge the displacement, and by applying the electrostatic attractive mode, the out-of-plane displacement is further enlarged. The implications of changing the actuator’s physical dimensions are discussed, along with the two-layer polysilicon surface microfabrication process used to fabricate such an actuator. The static characteristics of the out-of-plane displacement versus the voltage of both modes are tested, and displacements of 1.4 μm and 0.63 μm are obtained at 130 V and 15 V, respectively. Therefore, a total stroke of 2.03 μm is achieved, more than 3 fold that of the electrostatic attractive mode, making this actuator useful in optical Micro-Electro-Mechanical Systems (MEMS) and Radio Frequency (RF) MEMS applications.
Keywords: MEMS; out-of-plane actuator; electrostatic repulsive force; bi-directional; microfabrication; adaptive optics

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MDPI and ACS Style

Ren, H.; Wang, W.; Tao, F.; Yao, J. A Bi-Directional Out-of-Plane Actuator by Electrostatic Force. Micromachines 2013, 4, 431-443.

AMA Style

Ren H, Wang W, Tao F, Yao J. A Bi-Directional Out-of-Plane Actuator by Electrostatic Force. Micromachines. 2013; 4(4):431-443.

Chicago/Turabian Style

Ren, Hao; Wang, Weimin; Tao, Fenggang; Yao, Jun. 2013. "A Bi-Directional Out-of-Plane Actuator by Electrostatic Force." Micromachines 4, no. 4: 431-443.

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