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Tunable Sensor Response by Voltage-Control in Biomimetic Hair Flow Sensors
MESA+ Institute for Nanotechnology, University of Twente, 7500 AE Enschede, The Netherlands
* Author to whom correspondence should be addressed.
Received: 13 December 2012; in revised form: 7 March 2013 / Accepted: 8 March 2013 / Published: 19 March 2013
Abstract: We presented an overview of improvements in detection limit and responsivity of our biomimetic hair flow sensors by electrostatic spring-softening (ESS). Applying a DC-bias voltage to our capacitive flow sensors improves the responsively by up to 80% for flow signals at frequencies below the sensor’s resonance. Application of frequency matched AC-bias voltages allows for tunable filtering and selective gain up to 20 dB. Furthermore, the quality and fidelity of low frequency flow measurements can be improved using a non frequency-matched AC-bias voltage, resulting in a flow detection limit down to 5 mm/s at low (30 Hz) frequencies. The merits and applicability of the three methods are discussed.
Keywords: flow sensor; electrostatic spring softening; hair; cricket; biomimetics
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MDPI and ACS Style
Droogendijk, H.; Bruinink, C.M.; Sanders, R.G.; Krijnen, G.J. Tunable Sensor Response by Voltage-Control in Biomimetic Hair Flow Sensors. Micromachines 2013, 4, 116-127.
Droogendijk H, Bruinink CM, Sanders RG, Krijnen GJ. Tunable Sensor Response by Voltage-Control in Biomimetic Hair Flow Sensors. Micromachines. 2013; 4(1):116-127.
Droogendijk, Harmen; Bruinink, Christiaan M.; Sanders, Remco G.; Krijnen, Gijs J. 2013. "Tunable Sensor Response by Voltage-Control in Biomimetic Hair Flow Sensors." Micromachines 4, no. 1: 116-127.