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Micromachines 2012, 3(1), 62-77; doi:10.3390/mi3010062

Fabrication and Performance of a Photonic-Microfluidic Integrated Device

3,* , 1,* , 2
Received: 20 December 2011 / Revised: 20 January 2012 / Accepted: 7 February 2012 / Published: 15 February 2012
(This article belongs to the Special Issue Polymer MEMS)
View Full-Text   |   Download PDF [410 KB, 17 February 2012; original version 15 February 2012]   |   Browse Figures


Fabrication and performance of a functional photonic-microfluidic flow cytometer is demonstrated. The devices are fabricated on a Pyrex substrate by photolithographically patterning the microchannels and optics in a SU-8 layer that is sealed via a poly(dimethylsiloxane) (PDMS) layer through a unique chemical bonding method. The resulting devices eliminate the free-space excitation optics through integration of microlenses onto the chip to mimic conventional cytometry excitation. Devices with beam waists of 6 μm and 12 μm in fluorescent detection and counting tests using 2.5 and 6 μm beads-show CVs of 9%–13% and 23% for the two devices, respectively. These results are within the expectations for a conventional cytometer (5%–15%) and demonstrate the ability to integrate the photonic components for excitation onto the chip and the ability to maintain the level of reliable detection.
Keywords: SU-8; PDMS; microfluidics; optical waveguide; integration; devices SU-8; PDMS; microfluidics; optical waveguide; integration; devices
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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Watts, B.R.; Kowpak, T.; Zhang, Z.; Xu, C.-Q.; Zhu, S.; Cao, X.; Lin, M. Fabrication and Performance of a Photonic-Microfluidic Integrated Device. Micromachines 2012, 3, 62-77.

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