Micromachines 2012, 3(1), 62-77; doi:10.3390/mi3010062
Article

Fabrication and Performance of a Photonic-Microfluidic Integrated Device

1email, 2email, 3,* email, 1,* email, 2email, 4email and 5email
Received: 20 December 2011; in revised form: 20 January 2012 / Accepted: 7 February 2012 / Published: 15 February 2012
(This article belongs to the Special Issue Polymer MEMS)
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Abstract: Fabrication and performance of a functional photonic-microfluidic flow cytometer is demonstrated. The devices are fabricated on a Pyrex substrate by photolithographically patterning the microchannels and optics in a SU-8 layer that is sealed via a poly(dimethylsiloxane) (PDMS) layer through a unique chemical bonding method. The resulting devices eliminate the free-space excitation optics through integration of microlenses onto the chip to mimic conventional cytometry excitation. Devices with beam waists of 6 μm and 12 μm in fluorescent detection and counting tests using 2.5 and 6 μm beads-show CVs of 9%–13% and 23% for the two devices, respectively. These results are within the expectations for a conventional cytometer (5%–15%) and demonstrate the ability to integrate the photonic components for excitation onto the chip and the ability to maintain the level of reliable detection.
Keywords: SU-8; PDMS; microfluidics; optical waveguide; integration; devices
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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MDPI and ACS Style

Watts, B.R.; Kowpak, T.; Zhang, Z.; Xu, C.-Q.; Zhu, S.; Cao, X.; Lin, M. Fabrication and Performance of a Photonic-Microfluidic Integrated Device. Micromachines 2012, 3, 62-77.

AMA Style

Watts BR, Kowpak T, Zhang Z, Xu C-Q, Zhu S, Cao X, Lin M. Fabrication and Performance of a Photonic-Microfluidic Integrated Device. Micromachines. 2012; 3(1):62-77.

Chicago/Turabian Style

Watts, Benjamin R.; Kowpak, Thomas; Zhang, Zhiyi; Xu, Chang-Qing; Zhu, Shiping; Cao, Xudong; Lin, Min. 2012. "Fabrication and Performance of a Photonic-Microfluidic Integrated Device." Micromachines 3, no. 1: 62-77.


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