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Fabrication and Performance of a Photonic-Microfluidic Integrated Device
Department of Engineering Physics, McMaster University, 1280 Main Street West, Hamilton, ON L8S 4L7, Canada
Department of Chemical Engineering, McMaster University, 1280 Main Street West, Hamilton, ON L8S 4L7, Canada
Institute of Microstructural Science, National Research Council of Canada, 1200 Montreal Road, Ottawa, ON K1A 0R6, Canada
Department of Chemical and Biological Engineering, University of Ottawa, 550 Cumberland Street, Ottawa, ON K1N 6N5, Canada
Ottawa Laboratory Fallowfield, Canadian Food Inspection Agency, 3851 Fallowfield Road, Ottawa, ON K2H 8P9, Canada
* Authors to whom correspondence should be addressed.
Received: 20 December 2011; in revised form: 20 January 2012 / Accepted: 7 February 2012 / Published: 15 February 2012
Abstract: Fabrication and performance of a functional photonic-microfluidic flow cytometer is demonstrated. The devices are fabricated on a Pyrex substrate by photolithographically patterning the microchannels and optics in a SU-8 layer that is sealed via a poly(dimethylsiloxane) (PDMS) layer through a unique chemical bonding method. The resulting devices eliminate the free-space excitation optics through integration of microlenses onto the chip to mimic conventional cytometry excitation. Devices with beam waists of 6 μm and 12 μm in fluorescent detection and counting tests using 2.5 and 6 μm beads-show CVs of 9%–13% and 23% for the two devices, respectively. These results are within the expectations for a conventional cytometer (5%–15%) and demonstrate the ability to integrate the photonic components for excitation onto the chip and the ability to maintain the level of reliable detection.
Keywords: SU-8; PDMS; microfluidics; optical waveguide; integration; devices
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Cite This Article
MDPI and ACS Style
Watts, B.R.; Kowpak, T.; Zhang, Z.; Xu, C.-Q.; Zhu, S.; Cao, X.; Lin, M. Fabrication and Performance of a Photonic-Microfluidic Integrated Device. Micromachines 2012, 3, 62-77.
Watts BR, Kowpak T, Zhang Z, Xu C-Q, Zhu S, Cao X, Lin M. Fabrication and Performance of a Photonic-Microfluidic Integrated Device. Micromachines. 2012; 3(1):62-77.
Watts, Benjamin R.; Kowpak, Thomas; Zhang, Zhiyi; Xu, Chang-Qing; Zhu, Shiping; Cao, Xudong; Lin, Min. 2012. "Fabrication and Performance of a Photonic-Microfluidic Integrated Device." Micromachines 3, no. 1: 62-77.