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Micromachines 2012, 3(1), 62-77; doi:10.3390/mi3010062
Article

Fabrication and Performance of a Photonic-Microfluidic Integrated Device

1
,
2
,
3,* , 1,* , 2
,
4
 and
5
1 Department of Engineering Physics, McMaster University, 1280 Main Street West, Hamilton, ON L8S 4L7, Canada 2 Department of Chemical Engineering, McMaster University, 1280 Main Street West, Hamilton, ON L8S 4L7, Canada 3 Institute of Microstructural Science, National Research Council of Canada, 1200 Montreal Road, Ottawa, ON K1A 0R6, Canada 4 Department of Chemical and Biological Engineering, University of Ottawa, 550 Cumberland Street, Ottawa, ON K1N 6N5, Canada 5 Ottawa Laboratory Fallowfield, Canadian Food Inspection Agency, 3851 Fallowfield Road, Ottawa, ON K2H 8P9, Canada
* Authors to whom correspondence should be addressed.
Received: 20 December 2011 / Revised: 20 January 2012 / Accepted: 7 February 2012 / Published: 15 February 2012
(This article belongs to the Special Issue Polymer MEMS)
View Full-Text   |   Download PDF [410 KB, 17 February 2012; original version 15 February 2012]   |  

Abstract

Fabrication and performance of a functional photonic-microfluidic flow cytometer is demonstrated. The devices are fabricated on a Pyrex substrate by photolithographically patterning the microchannels and optics in a SU-8 layer that is sealed via a poly(dimethylsiloxane) (PDMS) layer through a unique chemical bonding method. The resulting devices eliminate the free-space excitation optics through integration of microlenses onto the chip to mimic conventional cytometry excitation. Devices with beam waists of 6 μm and 12 μm in fluorescent detection and counting tests using 2.5 and 6 μm beads-show CVs of 9%–13% and 23% for the two devices, respectively. These results are within the expectations for a conventional cytometer (5%–15%) and demonstrate the ability to integrate the photonic components for excitation onto the chip and the ability to maintain the level of reliable detection.
Keywords: SU-8; PDMS; microfluidics; optical waveguide; integration; devices SU-8; PDMS; microfluidics; optical waveguide; integration; devices
This is an open access article distributed under the Creative Commons Attribution License (CC BY 3.0).
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Watts, B.R.; Kowpak, T.; Zhang, Z.; Xu, C.-Q.; Zhu, S.; Cao, X.; Lin, M. Fabrication and Performance of a Photonic-Microfluidic Integrated Device. Micromachines 2012, 3, 62-77.

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