Micromachines 2012, 3(1), 62-77; doi:10.3390/mi3010062

Fabrication and Performance of a Photonic-Microfluidic Integrated Device

1email, 2email, 3,* email, 1,* email, 2email, 4email and 5email
Received: 20 December 2011; in revised form: 20 January 2012 / Accepted: 7 February 2012 / Published: 15 February 2012
(This article belongs to the Special Issue Polymer MEMS)
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Abstract: Fabrication and performance of a functional photonic-microfluidic flow cytometer is demonstrated. The devices are fabricated on a Pyrex substrate by photolithographically patterning the microchannels and optics in a SU-8 layer that is sealed via a poly(dimethylsiloxane) (PDMS) layer through a unique chemical bonding method. The resulting devices eliminate the free-space excitation optics through integration of microlenses onto the chip to mimic conventional cytometry excitation. Devices with beam waists of 6 μm and 12 μm in fluorescent detection and counting tests using 2.5 and 6 μm beads-show CVs of 9%–13% and 23% for the two devices, respectively. These results are within the expectations for a conventional cytometer (5%–15%) and demonstrate the ability to integrate the photonic components for excitation onto the chip and the ability to maintain the level of reliable detection.
Keywords: SU-8; PDMS; microfluidics; optical waveguide; integration; devices
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MDPI and ACS Style

Watts, B.R.; Kowpak, T.; Zhang, Z.; Xu, C.-Q.; Zhu, S.; Cao, X.; Lin, M. Fabrication and Performance of a Photonic-Microfluidic Integrated Device. Micromachines 2012, 3, 62-77.

AMA Style

Watts BR, Kowpak T, Zhang Z, Xu C-Q, Zhu S, Cao X, Lin M. Fabrication and Performance of a Photonic-Microfluidic Integrated Device. Micromachines. 2012; 3(1):62-77.

Chicago/Turabian Style

Watts, Benjamin R.; Kowpak, Thomas; Zhang, Zhiyi; Xu, Chang-Qing; Zhu, Shiping; Cao, Xudong; Lin, Min. 2012. "Fabrication and Performance of a Photonic-Microfluidic Integrated Device." Micromachines 3, no. 1: 62-77.

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