Micromachines 2011, 2(2), 167-178; doi:10.3390/mi2020167
Article

Effect of the Detector Width and Gas Pressure on the Frequency Response of a Micromachined Thermal Accelerometer

Received: 25 March 2011; in revised form: 18 May 2011 / Accepted: 19 May 2011 / Published: 23 May 2011
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
Abstract: In the present work, the design and the environmental conditions of a micromachined thermal accelerometer, based on convection effect, are discussed and studied in order to understand the behavior of the frequency response evolution of the sensor. It has been theoretically and experimentally studied with different detector widths, pressure and gas nature. Although this type of sensor has already been intensively examined, little information concerning the frequency response modeling is currently available and very few experimental results about the frequency response are reported in the literature. In some particular conditions, our measurements show a cut-off frequency at −3 dB greater than 200 Hz. By using simple cylindrical and planar models of the thermal accelerometer and an equivalent electrical circuit, a good agreement with the experimental results has been demonstrated.
Keywords: thermal accelerometer; silicon micromachined; optimization; frequency response; gas nature
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MDPI and ACS Style

Garraud, A.; Combette, P.; Courteaud, J.; Giani, A. Effect of the Detector Width and Gas Pressure on the Frequency Response of a Micromachined Thermal Accelerometer. Micromachines 2011, 2, 167-178.

AMA Style

Garraud A, Combette P, Courteaud J, Giani A. Effect of the Detector Width and Gas Pressure on the Frequency Response of a Micromachined Thermal Accelerometer. Micromachines. 2011; 2(2):167-178.

Chicago/Turabian Style

Garraud, Alexandra; Combette, Philippe; Courteaud, Johann; Giani, Alain. 2011. "Effect of the Detector Width and Gas Pressure on the Frequency Response of a Micromachined Thermal Accelerometer." Micromachines 2, no. 2: 167-178.

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