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Journal: Sensors, 2009
Volume: 9
Page(s): 6219-6231
6219-6231
Article: Manufacture of Micromirror Arrays Using a CMOS-MEMS Technique
Kao, P.-H.; Dai, C.-L.; Hsu, C.-C.; Wu, C.-C.

http://www.mdpi.com/1424-8220/9/8/6219

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