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Journal: Sensors, 2009
Volume: 9
Page(s): 8748-8760
8748-8760
Article: Fabrication of Wireless Micro Pressure Sensor Using the CMOS Process
Dai, C.-L.; Lu, P.-W.; Wu, C.-C.; Chang, C.

http://www.mdpi.com/1424-8220/9/11/8748

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