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Sensors 2008, 8(11), 7530-7544; doi:10.3390/s8117530

A Study on Increasing Sensitivity of Rectangular Microcantilevers Used in Biosensors

Department of Mechanical Engineering, Inha University, 253 Yonghyun-dong, Nam-Ku, Incheon, 402-751 Republic of Korea
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Received: 27 October 2008 / Revised: 10 November 2008 / Accepted: 10 November 2008 / Published: 25 November 2008
(This article belongs to the Special Issue BioMEMS)
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Abstract

This study proposes a new microcantilever design with a rectangular hole at the fixed end of the cantilever that is more sensitive than conventional ones. A commercial finite element analysis software ANSYS is used to analyze it. The Stoney equation is first used to calculate the surface stress induced moment, and then applied to the microcantilever free end to produce deflection. The stress analysis of the proposed and conventional designs is performed, followed by dynamic analysis of the proposed design. We found that the Sader equation is more accurate than Stoney in predicting cantilever deflections, and that for increasing the sensitivity of a microcantilever biosensor increasing the cantilever thickness is more practical.
Keywords: Surface stress; Biosensor; Microcantilever; Stoney equation; Sader equation Surface stress; Biosensor; Microcantilever; Stoney equation; Sader equation
This is an open access article distributed under the Creative Commons Attribution License (CC BY 3.0).

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MDPI and ACS Style

Ansari, M.Z.; Cho, C. A Study on Increasing Sensitivity of Rectangular Microcantilevers Used in Biosensors. Sensors 2008, 8, 7530-7544.

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