Next Article in Journal
An Open Localization and Local Communication Embodied Sensor
Next Article in Special Issue
Performance of a Diaphragmed Microlens for a Packaged Microspectrometer
Previous Article in Journal
Pattern Recognition via PCNN and Tsallis Entropy
Previous Article in Special Issue
NeuroMEMS: Neural Probe Microtechnologies
Article Menu

Export Article

Open AccessArticle
Sensors 2008, 8(11), 7530-7544; doi:10.3390/s8117530

A Study on Increasing Sensitivity of Rectangular Microcantilevers Used in Biosensors

Department of Mechanical Engineering, Inha University, 253 Yonghyun-dong, Nam-Ku, Incheon, 402-751 Republic of Korea
Authors to whom correspondence should be addressed.
Received: 27 October 2008 / Revised: 10 November 2008 / Accepted: 10 November 2008 / Published: 25 November 2008
(This article belongs to the Special Issue BioMEMS)
View Full-Text   |   Download PDF [628 KB, uploaded 21 June 2014]   |  


This study proposes a new microcantilever design with a rectangular hole at the fixed end of the cantilever that is more sensitive than conventional ones. A commercial finite element analysis software ANSYS is used to analyze it. The Stoney equation is first used to calculate the surface stress induced moment, and then applied to the microcantilever free end to produce deflection. The stress analysis of the proposed and conventional designs is performed, followed by dynamic analysis of the proposed design. We found that the Sader equation is more accurate than Stoney in predicting cantilever deflections, and that for increasing the sensitivity of a microcantilever biosensor increasing the cantilever thickness is more practical. View Full-Text
Keywords: Surface stress; Biosensor; Microcantilever; Stoney equation; Sader equation Surface stress; Biosensor; Microcantilever; Stoney equation; Sader equation

This is an open access article distributed under the Creative Commons Attribution License (CC BY 3.0).

Scifeed alert for new publications

Never miss any articles matching your research from any publisher
  • Get alerts for new papers matching your research
  • Find out the new papers from selected authors
  • Updated daily for 49'000+ journals and 6000+ publishers
  • Define your Scifeed now

SciFeed Share & Cite This Article

MDPI and ACS Style

Ansari, M.Z.; Cho, C. A Study on Increasing Sensitivity of Rectangular Microcantilevers Used in Biosensors. Sensors 2008, 8, 7530-7544.

Show more citation formats Show less citations formats

Related Articles

Article Metrics

Article Access Statistics



[Return to top]
Sensors EISSN 1424-8220 Published by MDPI AG, Basel, Switzerland RSS E-Mail Table of Contents Alert
Back to Top