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Journal: Sensors, 2006
Volume: 6
Page(s): 405-419
405-419
Article: High-temperature MEMS Heater Platforms: Long-term Performance of Metal and Semiconductor Heater Materials
Spannhake, J.; Schulz, O.; Helwig, A.; Krenkow, A.; Müller, G.; Doll, T.

http://www.mdpi.com/1424-8220/6/4/405

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