Next Article in Journal
Magneto-controlled Quantized Electron Transfer to Surface-confined Redox Units and Metal Nanoparticles
Previous Article in Journal
Functional Testing and Characterisation of ISFETs on Wafer Level by Means of a Micro-droplet Cell
Article Menu

Export Article

Open AccessArticle
Sensors 2006, 6(4), 405-419; https://doi.org/10.3390/s6040405

High-temperature MEMS Heater Platforms: Long-term Performance of Metal and Semiconductor Heater Materials

1
Corporate Research Centre, EADS Deutschland GmbH, D-81663 München, Germany
2
Institute of Microtechnology Mainz, D-55129 Mainz, Germany
*
Author to whom correspondence should be addressed.
Received: 12 July 2005 / Accepted: 24 March 2006 / Published: 7 April 2006
View Full-Text   |   Download PDF [276 KB, uploaded 20 June 2014]

Abstract

Micromachined thermal heater platforms offer low electrical power consumptionand high modulation speed, i.e. properties which are advantageous for realizing non-dispersive infrared (NDIR) gas- and liquid monitoring systems. In this paper, we report oninvestigations on silicon-on-insulator (SOI) based infrared (IR) emitter devices heated byemploying different kinds of metallic and semiconductor heater materials. Our resultsclearly reveal the superior high-temperature performance of semiconductor over metallicheater materials. Long-term stable emitter operation in the vicinity of 1300 K could beattained using heavily antimony-doped tin dioxide (SnO2:Sb) heater elements. View Full-Text
Keywords: Hotplate; heater metallisation; high-temperature stability; electro-migration; doped silicon; doped metal oxide; antimony doped tin oxide. Hotplate; heater metallisation; high-temperature stability; electro-migration; doped silicon; doped metal oxide; antimony doped tin oxide.
This is an open access article distributed under the Creative Commons Attribution License (CC BY 3.0).
SciFeed

Share & Cite This Article

MDPI and ACS Style

Spannhake, J.; Schulz, O.; Helwig, A.; Krenkow, A.; Müller, G.; Doll, T. High-temperature MEMS Heater Platforms: Long-term Performance of Metal and Semiconductor Heater Materials. Sensors 2006, 6, 405-419.

Show more citation formats Show less citations formats

Related Articles

Article Metrics

Article Access Statistics

1

Comments

[Return to top]
Sensors EISSN 1424-8220 Published by MDPI AG, Basel, Switzerland RSS E-Mail Table of Contents Alert
Back to Top