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Sensors 2006, 6(4), 397-404; https://doi.org/10.3390/s6040397

Functional Testing and Characterisation of ISFETs on Wafer Level by Means of a Micro-droplet Cell

1
Aachen University of Applied Sciences, Jülich Campus, Laboratory for Chemical Sensors and Biosensors, Ginsterweg 1, 52428 Jülich, Germany
2
Institute of Thin Films and Interfaces (ISG-2), Research Centre Jülich GmbH, 52425 Jülich, Germany
3
AGEF e.V.-Institute, Heinrich-Heine University, 40225 Düsseldorf, Germany
*
Author to whom correspondence should be addressed.
Received: 28 July 2005 / Accepted: 4 January 2006 / Published: 7 April 2006
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Abstract

A wafer-level functionality testing and characterisation system for ISFETs (ion-sensitive field-effect transistor) is realised by means of integration of a specifically designedcapillary electrochemical micro-droplet cell into a commercial wafer prober-station. Thedeveloped system allows the identification and selection of “good” ISFETs at the earlieststage and to avoid expensive bonding, encapsulation and packaging processes for non-functioning ISFETs and thus, to decrease costs, which are wasted for bad dies. Thedeveloped system is also feasible for wafer-level characterisation of ISFETs in terms ofsensitivity, hysteresis and response time. Additionally, the system might be also utilised forwafer-level testing of further electrochemical sensors. View Full-Text
Keywords: ISFET; wafer-level testing; capillary micro-droplet cell. ISFET; wafer-level testing; capillary micro-droplet cell.
This is an open access article distributed under the Creative Commons Attribution License (CC BY 3.0).
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Poghossian, A.; Schumacher, K.; Kloock, J.P.; Rosenkranz, C.; Schultze, J.W.; Müller-Veggian, M.; Schöning, M.J. Functional Testing and Characterisation of ISFETs on Wafer Level by Means of a Micro-droplet Cell. Sensors 2006, 6, 397-404.

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