Functional Testing and Characterisation of ISFETs on Wafer Level by Means of a Micro-droplet Cell
AbstractA wafer-level functionality testing and characterisation system for ISFETs (ion-sensitive field-effect transistor) is realised by means of integration of a specifically designedcapillary electrochemical micro-droplet cell into a commercial wafer prober-station. Thedeveloped system allows the identification and selection of “good” ISFETs at the earlieststage and to avoid expensive bonding, encapsulation and packaging processes for non-functioning ISFETs and thus, to decrease costs, which are wasted for bad dies. Thedeveloped system is also feasible for wafer-level characterisation of ISFETs in terms ofsensitivity, hysteresis and response time. Additionally, the system might be also utilised forwafer-level testing of further electrochemical sensors. View Full-Text
Scifeed alert for new publicationsNever miss any articles matching your research from any publisher
- Get alerts for new papers matching your research
- Find out the new papers from selected authors
- Updated daily for 49'000+ journals and 6000+ publishers
- Define your Scifeed now
Poghossian, A.; Schumacher, K.; Kloock, J.P.; Rosenkranz, C.; Schultze, J.W.; Müller-Veggian, M.; Schöning, M.J. Functional Testing and Characterisation of ISFETs on Wafer Level by Means of a Micro-droplet Cell. Sensors 2006, 6, 397-404.
Poghossian A, Schumacher K, Kloock JP, Rosenkranz C, Schultze JW, Müller-Veggian M, Schöning MJ. Functional Testing and Characterisation of ISFETs on Wafer Level by Means of a Micro-droplet Cell. Sensors. 2006; 6(4):397-404.Chicago/Turabian Style
Poghossian, Arshak; Schumacher, Kerstin; Kloock, Joachim P.; Rosenkranz, Christian; Schultze, Joachim W.; Müller-Veggian, Mattea; Schöning, Michael J. 2006. "Functional Testing and Characterisation of ISFETs on Wafer Level by Means of a Micro-droplet Cell." Sensors 6, no. 4: 397-404.