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Sensors 2018, 18(2), 453; https://doi.org/10.3390/s18020453

Self-Test Procedures for Gas Sensors Embedded in Microreactor Systems

1
Airbus Central R&T, D-81663 Munich, Germany
2
Department of Applied Sciences and Mechatronics, Munich University of Applied Sciences, D-80335 Munich, Germany
3
SENSOR, Dipartimento di Ingegneria dell’Informazione, Università degli Studi di Brescia, via Valotti 9, 25123 Brescia, Italy
*
Author to whom correspondence should be addressed.
Received: 21 December 2017 / Revised: 30 January 2018 / Accepted: 31 January 2018 / Published: 3 February 2018
(This article belongs to the Special Issue Gas Sensors based on Semiconducting Metal Oxides)
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Abstract

Metal oxide (MOX) gas sensors sensitively respond to a wide variety of combustible, explosive and poisonous gases. However, due to the lack of a built-in self-test capability, MOX gas sensors have not yet been able to penetrate safety-critical applications. In the present work we report on gas sensing experiments performed on MOX gas sensors embedded in ceramic micro-reaction chambers. With the help of an external micro-pump, such systems can be operated in a periodic manner alternating between flow and no-flow conditions, thus allowing repetitive measurements of the sensor resistances under clean air, R 0 , and under gas exposure, R g a s , to be obtained, even under field conditions. With these pairs of resistance values, eventual drifts in the sensor baseline resistance can be detected and drift-corrected values of the relative resistance response R e s p = ( R 0 R g a s ) / R 0 can be determined. Residual poisoning-induced changes in the relative resistance response can be detected by reference to humidity measurements taken with room-temperature-operated capacitive humidity sensors which are insensitive to the poisoning processes operative on heated MOX gas sensors. View Full-Text
Keywords: metal oxide; gas sensor; drift; poisoning; self-test; MEMS; micro-reactor; micro-heater metal oxide; gas sensor; drift; poisoning; self-test; MEMS; micro-reactor; micro-heater
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).
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Helwig, A.; Hackner, A.; Müller, G.; Zappa, D.; Sberveglieri, G. Self-Test Procedures for Gas Sensors Embedded in Microreactor Systems. Sensors 2018, 18, 453.

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