Testing of Piezo-Actuated Glass Micro-Membranes by Optical Low-Coherence Reflectometry
AbstractIn this work, we have applied optical low-coherence reflectometry (OLCR), implemented with infra-red light propagating in fiberoptic paths, to perform static and dynamic analyses on piezo-actuated glass micro-membranes. The actuator was fabricated by means of thin-film piezoelectric MEMS technology and was employed for modifying the micro-membrane curvature, in view of its application in micro-optic devices, such as variable focus micro-lenses. We are here showing that OLCR incorporating a near-infrared superluminescent light emitting diode as the read-out source is suitable for measuring various parameters such as the micro-membrane optical path-length, the membrane displacement as a function of the applied voltage (yielding the piezo-actuator hysteresis) as well as the resonance curve of the fundamental vibration mode. The use of an optical source with short coherence-time allows performing interferometric measurements without spurious resonance effects due to multiple parallel interfaces of highly planar slabs, furthermore selecting the plane/layer to be monitored. We demonstrate that the same compact and flexible setup can be successfully employed to perform spot optical measurements for static and dynamic characterization of piezo-MEMS in real time. View Full-Text
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Merlo, S.; Poma, P.; Crisà, E.; Faralli, D.; Soldo, M. Testing of Piezo-Actuated Glass Micro-Membranes by Optical Low-Coherence Reflectometry. Sensors 2017, 17, 462.
Merlo S, Poma P, Crisà E, Faralli D, Soldo M. Testing of Piezo-Actuated Glass Micro-Membranes by Optical Low-Coherence Reflectometry. Sensors. 2017; 17(3):462.Chicago/Turabian Style
Merlo, Sabina; Poma, Paolo; Crisà, Eleonora; Faralli, Dino; Soldo, Marco. 2017. "Testing of Piezo-Actuated Glass Micro-Membranes by Optical Low-Coherence Reflectometry." Sensors 17, no. 3: 462.