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Sensors 2017, 17(3), 462; doi:10.3390/s17030462

Testing of Piezo-Actuated Glass Micro-Membranes by Optical Low-Coherence Reflectometry

1
Dipartimento di Ingegneria Industriale e dell’Informazione, Università degli Studi di Pavia, 27100 Pavia, Italy
2
STMicroelectronics, 20864 Agrate Brianza (MB), Italy
3
STMicroelectronics, 20010 Cornaredo (Mi), Italy
*
Author to whom correspondence should be addressed.
Academic Editor: Stefano Mariani
Received: 13 January 2017 / Revised: 20 February 2017 / Accepted: 20 February 2017 / Published: 25 February 2017
(This article belongs to the Collection Modeling, Testing and Reliability Issues in MEMS Engineering)
View Full-Text   |   Download PDF [2759 KB, uploaded 25 February 2017]   |  

Abstract

In this work, we have applied optical low-coherence reflectometry (OLCR), implemented with infra-red light propagating in fiberoptic paths, to perform static and dynamic analyses on piezo-actuated glass micro-membranes. The actuator was fabricated by means of thin-film piezoelectric MEMS technology and was employed for modifying the micro-membrane curvature, in view of its application in micro-optic devices, such as variable focus micro-lenses. We are here showing that OLCR incorporating a near-infrared superluminescent light emitting diode as the read-out source is suitable for measuring various parameters such as the micro-membrane optical path-length, the membrane displacement as a function of the applied voltage (yielding the piezo-actuator hysteresis) as well as the resonance curve of the fundamental vibration mode. The use of an optical source with short coherence-time allows performing interferometric measurements without spurious resonance effects due to multiple parallel interfaces of highly planar slabs, furthermore selecting the plane/layer to be monitored. We demonstrate that the same compact and flexible setup can be successfully employed to perform spot optical measurements for static and dynamic characterization of piezo-MEMS in real time. View Full-Text
Keywords: optical low-coherence reflectometry; optical measurements; thin-film piezo-electric actuator; non-destructive testing optical low-coherence reflectometry; optical measurements; thin-film piezo-electric actuator; non-destructive testing
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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MDPI and ACS Style

Merlo, S.; Poma, P.; Crisà, E.; Faralli, D.; Soldo, M. Testing of Piezo-Actuated Glass Micro-Membranes by Optical Low-Coherence Reflectometry. Sensors 2017, 17, 462.

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