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Sensors 2016, 16(4), 468; doi:10.3390/s16040468

Design and Vibration Sensitivity Analysis of a MEMS Tuning Fork Gyroscope with an Anchored Diamond Coupling Mechanism

1
State Key Laboratory of Explosion Science and Technology, Beijing Institute of Technology, Beijing 100081, China
2
School of Mechatronical Engineering, Beijing Institute of Technology, Beijing 100081, China
*
Author to whom correspondence should be addressed.
Academic Editor: Vittorio M. N. Passaro
Received: 24 February 2016 / Revised: 27 March 2016 / Accepted: 29 March 2016 / Published: 2 April 2016
(This article belongs to the Section Physical Sensors)
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Abstract

In this paper, a new micromachined tuning fork gyroscope (TFG) with an anchored diamond coupling mechanism is proposed while the mode ordering and the vibration sensitivity are also investigated. The sense-mode of the proposed TFG was optimized through use of an anchored diamond coupling spring, which enables the in-phase mode frequency to be 108.3% higher than the anti-phase one. The frequencies of the in- and anti-phase modes in the sense direction are 9799.6 Hz and 4705.3 Hz, respectively. The analytical solutions illustrate that the stiffness difference ratio of the in- and anti-phase modes is inversely proportional to the output induced by the vibration from the sense direction. Additionally, FEM simulations demonstrate that the stiffness difference ratio of the anchored diamond coupling TFG is 16.08 times larger than the direct coupling one while the vibration output is reduced by 94.1%. Consequently, the proposed new anchored diamond coupling TFG can structurally increase the stiffness difference ratio to improve the mode ordering and considerably reduce the vibration sensitivity without sacrificing the scale factor. View Full-Text
Keywords: vibration sensitivity; tuning fork gyroscopes; anchored diamond coupling mechanism; stiffness difference ratio; coordinate transformation method vibration sensitivity; tuning fork gyroscopes; anchored diamond coupling mechanism; stiffness difference ratio; coordinate transformation method
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Guan, Y.; Gao, S.; Liu, H.; Jin, L.; Niu, S. Design and Vibration Sensitivity Analysis of a MEMS Tuning Fork Gyroscope with an Anchored Diamond Coupling Mechanism. Sensors 2016, 16, 468.

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