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Sensors 2016, 16(2), 210; doi:10.3390/s16020210

A Novel Piezoresistive Accelerometer with SPBs to Improve the Tradeoff between the Sensitivity and the Resonant Frequency

State Key Laboratory for Manufacturing Systems Engineering, Collaborative Innovation Center of Suzhou Nano Science and Technology, Xi’an Jiaotong University, Xi’an 710049, China
These authors contributed equally to this work.
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Author to whom correspondence should be addressed.
Academic Editor: Vittorio M.N. Passaro
Received: 6 December 2015 / Accepted: 2 February 2016 / Published: 6 February 2016
(This article belongs to the Section Physical Sensors)
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Abstract

For improving the tradeoff between the sensitivity and the resonant frequency of piezoresistive accelerometers, the dependency between the stress of the piezoresistor and the displacement of the structure is taken into consideration in this paper. In order to weaken the dependency, a novel structure with suspended piezoresistive beams (SPBs) is designed, and a theoretical model is established for calculating the location of SPBs, the stress of SPBs and the resonant frequency of the whole structure. Finite element method (FEM) simulations, comparative simulations and experiments are carried out to verify the good agreement with the theoretical model. It is demonstrated that increasing the sensitivity greatly without sacrificing the resonant frequency is possible in the piezoresistive accelerometer design. Therefore, the proposed structure with SPBs is potentially a novel option for improving the tradeoff between the sensitivity and the resonant frequency of piezoresistive accelerometers. View Full-Text
Keywords: piezoresistive accelerometer; sensitivity; resonant frequency; SPBs piezoresistive accelerometer; sensitivity; resonant frequency; SPBs
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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MDPI and ACS Style

Xu, Y.; Zhao, L.; Jiang, Z.; Ding, J.; Peng, N.; Zhao, Y. A Novel Piezoresistive Accelerometer with SPBs to Improve the Tradeoff between the Sensitivity and the Resonant Frequency. Sensors 2016, 16, 210.

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