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Sensors 2016, 16(2), 200; doi:10.3390/s16020200

Mechanical Modulation of Phonon-Assisted Field Emission in a Silicon Nanomembrane Detector for Time-of-Flight Mass Spectrometry

1
Department of Electrical Engineering, Kyungpook National University, Daegu, 702-701, Korea
2
Center for Hybrid Nanostructures (CHYN), Institute of Nanostructure and Solid State Physics, University of Hamburg, Jungiussstr. 11, 20355 Hamburg, Germany
*
Authors to whom correspondence should be addressed.
Academic Editor: Alexander Star
Received: 18 November 2015 / Revised: 27 January 2016 / Accepted: 2 February 2016 / Published: 5 February 2016
(This article belongs to the Section Biosensors)
View Full-Text   |   Download PDF [1180 KB, uploaded 5 February 2016]   |  

Abstract

We demonstrate mechanical modulation of phonon-assisted field emission in a free-standing silicon nanomembrane detector for time-of-flight mass spectrometry of proteins. The impacts of ion bombardment on the silicon nanomembrane have been explored in both mechanical and electrical points of view. Locally elevated lattice temperature in the silicon nanomembrane, resulting from the transduction of ion kinetic energy into thermal energy through the ion bombardment, induces not only phonon-assisted field emission but also a mechanical vibration in the silicon nanomembrane. The coupling of these mechanical and electrical phenomenon leads to mechanical modulation of phonon-assisted field emission. The thermal energy relaxation through mechanical vibration in addition to the lateral heat conduction and field emission in the silicon nanomembrane offers effective cooling of the nanomembrane, thereby allowing high resolution mass analysis. View Full-Text
Keywords: NEMS; MALDI TOF; silicon nanomembrane; mass spectrometry; phonon; ion detector NEMS; MALDI TOF; silicon nanomembrane; mass spectrometry; phonon; ion detector
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Park, J.; Blick, R.H. Mechanical Modulation of Phonon-Assisted Field Emission in a Silicon Nanomembrane Detector for Time-of-Flight Mass Spectrometry. Sensors 2016, 16, 200.

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