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Sensors 2015, 15(9), 22530-22546; doi:10.3390/s150922530

Design and Realization of a Three Degrees of Freedom Displacement Measurement System Composed of Hall Sensors Based on Magnetic Field Fitting by an Elliptic Function

Harbin Institute of Technology, D-403 Science Park, No. 2 Yikuang Street, Harbin 150080, China
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Author to whom correspondence should be addressed.
Academic Editor: Vittorio M. N. Passaro
Received: 15 July 2015 / Accepted: 31 August 2015 / Published: 8 September 2015
(This article belongs to the Section Physical Sensors)
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Abstract

This paper presents the design and realization of a three degrees of freedom (DOFs) displacement measurement system composed of Hall sensors, which is built for the XYθz displacement measurement of the short stroke stage of the reticle stage of lithography. The measurement system consists of three pairs of permanent magnets mounted on the same plane on the short stroke stage along the Y, Y, X directions, and three single axis Hall sensors correspondingly mounted on the frame of the reticle stage. The emphasis is placed on the decoupling and magnetic field fitting of the three DOFs measurement system. The model of the measurement system is illustrated, and the XY positions and θZ rotation of the short stroke stage can be obtained by decoupling the sensor outputs. A magnetic field fitting by an elliptic function-based compensation method is proposed. The practical field intensity of a permanent magnet at a certain plane height can be substituted for the output voltage of a Hall sensors, which can be expressed by the elliptic function through experimental data as the crucial issue to calculate the three DOFs displacement. Experimental results of the Hall sensor displacement measurement system are presented to validate the proposed three DOFs measurement system. View Full-Text
Keywords: Hall sensor; displacement measurement; magnetic field fitting; elliptic function Hall sensor; displacement measurement; magnetic field fitting; elliptic function
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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MDPI and ACS Style

Zhao, B.; Wang, L.; Tan, J.-B. Design and Realization of a Three Degrees of Freedom Displacement Measurement System Composed of Hall Sensors Based on Magnetic Field Fitting by an Elliptic Function. Sensors 2015, 15, 22530-22546.

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