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Sensors 2015, 15(1), 1623-1634; doi:10.3390/s150101623

Ethanol Microsensors with a Readout Circuit Manufactured Using the CMOS-MEMS Technique

Department of Mechanical Engineering, National Chung Hsing University, Taichung 402, Taiwan
Author to whom correspondence should be addressed.
Received: 12 November 2014 / Accepted: 9 January 2015 / Published: 14 January 2015
(This article belongs to the Section Physical Sensors)
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The design and fabrication of an ethanol microsensor integrated with a readout circuit on-a-chip using the complementary metal oxide semiconductor (CMOS)-microelectro -mechanical system (MEMS) technique are investigated. The ethanol sensor is made up of a heater, a sensitive film and interdigitated electrodes. The sensitive film is tin dioxide that is prepared by the sol-gel method. The heater is located under the interdigitated electrodes, and the sensitive film is coated on the interdigitated electrodes. The sensitive film needs a working temperature of 220 °C. The heater is employed to provide the working temperature of sensitive film. The sensor generates a change in capacitance when the sensitive film senses ethanol gas. A readout circuit is used to convert the capacitance variation of the sensor into the output frequency. Experiments show that the sensitivity of the ethanol sensor is 0.9 MHz/ppm. View Full-Text
Keywords: ethanol sensor; tin dioxide film; heater; CMOS-MEMS ethanol sensor; tin dioxide film; heater; CMOS-MEMS

This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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Yang, M.-Z.; Dai, C.-L. Ethanol Microsensors with a Readout Circuit Manufactured Using the CMOS-MEMS Technique. Sensors 2015, 15, 1623-1634.

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